Patents by Inventor Carli Huber

Carli Huber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for area selective-atomic layer deposition
    Patent number: 11342176
    Abstract: An integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for conducting nanofabrication includes an electrohydrodynamic jet printing station that includes an E-jet printing nozzle, a spatial atomic layer deposition station that includes a zoned ALD precursor gas distributor that discharges linear zone-separated first and second ALD precursor gases, a heatable substrate plate supported on a motion actuator controllable to move the substrate plate in three dimensions, and a conveyor on which the motion actuator is supported. The conveyor is operative to move the motion actuator between the electrohydrodynamic jet printing station and the spatial atomic layer deposition station so that the substrate plate is conveyable between a printing window of the E-jet printing nozzle and a deposition window of the zoned ALD precursor gas distributor, respectively. A method of conducting area-selective atomic layer deposition is also disclosed.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: May 24, 2022
    Assignee: The Regents of the University of Michigan
    Inventors: Mattison Rose, Kira Barton, Neil Dasgupta, Lauren Ransohoff, Ellis Herman, Orlando Trejo, Carli Huber, Tae H. Cho, Eric Kazyak, Christopher P. Pannier
  • INTEGRATED ELECTROHYDRODYNAMIC JET PRINTING AND SPATIAL ATOMIC LAYER DEPOSITION SYSTEM FOR AREA SELECTIVE-ATOMIC LAYER DEPOSITION
    Publication number: 20210028006
    Abstract: An integrated electrohydrodynamic jet printing and spatial atomic layer deposition system for conducting nanofabrication includes an electrohydrodynamic jet printing station that includes an E-jet printing nozzle, a spatial atomic layer deposition station that includes a zoned ALD precursor gas distributor that discharges linear zone-separated first and second ALD precursor gases, a heatable substrate plate supported on a motion actuator controllable to move the substrate plate in three dimensions, and a conveyor on which the motion actuator is supported. The conveyor is operative to move the motion actuator between the electrohydrodynamic jet printing station and the spatial atomic layer deposition station so that the substrate plate is conveyable between a printing window of the E-jet printing nozzle and a deposition window of the zoned ALD precursor gas distributor, respectively. A method of conducting area-selective atomic layer deposition is also disclosed.
    Type: Application
    Filed: July 23, 2020
    Publication date: January 28, 2021
    Inventors: Mattison Rose, Kira Barton, Neil Dasgupta, Lauren Ransohoff, Ellis Herman, Orlando Trejo, Carli Huber, Tae H. Cho, Erik Kazyak, Christopher P. Pannier