Abstract: A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.

Abstract: An assembly used in a deformable mirror comprises a support having at least one opening therein. A thin optical substrate making up the mirror is provided and has a light reflective first surface and an opposite back surface. A coupling is provided for controllably movably coupling the back surface of the optical substrate and the support to one another. The coupling includes at least one shaped memory metal cylindrical part operatively connecting the optical substrate and the support.

Abstract: An assembly comprises a support having at least one opening therein and an optical substrate having a light reflective first surface and an opposite back surface. At least one actuator assembly is provided and is located within the at least one opening and is connected to the back surface of the optical substrate and the support. The at least one actuator assembly having a portion with a diameter slightly smaller than the inner diameter of the at least one opening to form a gap therebetween. An internal passage is formed in the portion of the at least one actuator assembly and communicates with an external surface thereof. An adhesive pinning is formed in the gap between the inner surface of the at least one opening and the juxtaposed portion of the at least one actuator and is formed by injecting adhesive into the gap through the passage.

Abstract: An assembly comprises a base (12,12') and a thin optical substrate (44) having a light reflective first surface (43) and an opposite back surface (45). A coupling medium (8,8) couples the back surface (45) of said optical substrate and the base to one another. At least one piezoelectric actuator (10) is interspersed within the coupling medium for controllably altering the shape of the optical substrate.

Abstract: A deformable mirror device which includes a deformable face plate, a backing plate spaced from the deformable face plate, and at least one axially movable actuator which extends between the face plate and the backing plate. The actuator is fixed adjacent a first end to the backing plate and adjacent a second end, which is opposed to the first end, to the deformable face plate in a kinematic joint by reason of which no forces are transmitted in an ideal mating of the two components. At least a portion of the actuator may be disconnected and removed from the first end, and replaced by another actuator. The kinematic joint includes a high temperature, permanent, joint and a pair of spaced apart, low temperature, temporary joints. The high temperature joint is defined by a ball segment affixed to the deformable face plate as by frit. One of the low temperature joints is defined by an epoxy connection between the actuator at its first end and the backing plate.

Abstract: A method of fabricating a thin mirror (10) includes the step of supporting the thin mirror (10) on an air cushion (12) while a rigid support structure (16) is interfaced therewith. The disclosed method avoids the introduction of stresses and strains during the fabrication process.

Abstract: The present invention is directed to a new and improved X-ray mask ring assembly and apparatus for making same which includes a mask ring, a plurality of kinematic mounts for removably mounting the mask on an alignment cartridge, each of the kinematic mounts including an insert member having a funnel-like shaped seat for receiving a mating ball-like shaped member mounted on the alignment cartridge, and an adhesive for mounting the insert member on the mask ring.

Abstract: The present invention is directed to X-ray lithographic systems, which are characterized by a plurality of work stations, a cartridge in which a wafer and mask are mounted, apparatus for moving the cartridge between the stations, apparatus for moving the cartridge within each station to a kinematic mount, and said kinematic mounts in all of the stations being substantially identical.

Abstract: This invention is directed to a mask ring assembly for X-ray lithography which is particularly adapted, among other possible uses, for use in replicating integrated circuit patterns, said assembly including a mask ring, a plurality of kinematic mounts for removably mounting the mask ring on an alignment cartridge, each of the kinematic mounts including a funnel-like shaped seat member and a mating ball-like shaped member, one of said members being on the mask ring and the other of the members being mounted on the alignment cartridge.

Abstract: This invention is directed to an actuator which is particularly adapted among many other possible uses, or use in adjusting the configuration of deformable mirrors.

Abstract: A lamp comprising a tubular quartz envelope having a mounting base compression fitted to one end thereof.