Patents by Inventor Carlo Lietti

Carlo Lietti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing metrological structures particularly useful for analyzing the accuracy of instruments for measuring alignment on processed substrates
    Patent number: 5246539
    Abstract: Process for producing metrological structures particularly useful for analyzing the accuracy of instruments for measuring alignment on processed substrates. The process produces metrological structures which have measurement profiles defined on substrate regions and on industrially-processed regions on a single wafer. The measurement profiles define statistical distributions which can be detected by measurement machines in order to analyze the measurement accuracy of the machines themselves.
    Type: Grant
    Filed: September 1, 1992
    Date of Patent: September 21, 1993
    Assignee: SGS-Thomson Microelectronics S.r.l.
    Inventors: Paolo Canestrari, Carlo Lietti, Giovanni Rivera