Patents by Inventor Carlo Waldfried

Carlo Waldfried has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240344195
    Abstract: Described are coatings that contain of fluorinated yttrium oxide and a metal oxide; methods of preparing these coatings; substrates, surfaces, equipment, and components of equipment that include a coating that contains a combination of fluorinated yttrium oxide and a metal oxide; and methods of preparing and using the coatings and coated substrates.
    Type: Application
    Filed: June 24, 2024
    Publication date: October 17, 2024
    Inventors: Carlo Waldfried, Stephen Longo
  • Publication number: 20240337023
    Abstract: Articles and methods relating to coatings having superior chemical resistance and structural integrity, can be prepared via atomic layer deposition and fluoro-annealing at low process temperatures of between about 150° C. and less than 300° C. The film comprises a fluorinated metal oxide containing yttrium.
    Type: Application
    Filed: June 17, 2024
    Publication date: October 10, 2024
    Inventors: I-Kuan Lin, Carlo Waldfried, Jianan Hou
  • Patent number: 12101920
    Abstract: A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.
    Type: Grant
    Filed: April 5, 2023
    Date of Patent: September 24, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Yuxuan Liu, Zhifeng Li, Carlo Waldfried, Yan Liu, Chandra Venkatraman, Pushkara Rao Varanasi
  • Patent number: 12084778
    Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that is deleterious to the substrate article, structure, material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: September 10, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Bryan C. Hendrix, David W. Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda, I-Kuan Lin
  • Publication number: 20240239047
    Abstract: Some embodiments relate to additive manufactured articles having coated surfaces and related methods. The methods may comprise forming a three-dimensional (3D) article by additive manufacturing to obtain an additive manufactured 3D article having a monolithic structure that is not capable of construction by machining, and exposing the additive manufactured 3D article to one or more precursor gases to form a coating layer on a surface of the additive manufactured 3D article. The additive manufactured articles may comprise an additive manufactured three-dimensional (3D) body. The additive manufactured 3D body may have a monolithic structure that is not capable of construction by machining. The additive manufactured 3D body may have a coating layer on a surface of the additive manufactured 3D body.
    Type: Application
    Filed: March 28, 2024
    Publication date: July 18, 2024
    Inventor: Carlo Waldfried
  • Patent number: 12031212
    Abstract: Described are yttrium fluoride compositions, including deposited films, e.g., coatings, that contain yttrium fluoride; methods of preparing yttrium fluoride compositions and deposited film coatings that contain yttrium fluoride; as well as substrates that have a deposited film coating that contains yttrium fluoride at a surface and methods and equipment that include the substrates.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: July 9, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Carlo Waldfried, Stephen Longo, Parul Tyagi
  • Patent number: 12018382
    Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that deleterious to the substrate article, structure material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: June 25, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Bryan C. Hendrix, David W. Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda, I-Kuan Lin
  • Publication number: 20230416913
    Abstract: A system including a chemical supply cabinet (e.g., such as a chemical supply cabinet configured to contain an ampoule), a module configured to modify a surface, and a control unit connected to the module, wherein the control unit is configured to direct the modifying of the surface.
    Type: Application
    Filed: June 28, 2023
    Publication date: December 28, 2023
    Inventors: Bryan C. Hendrix, Carlo Waldfried, Scott L. Battle, Gavin Richards, Benjamin R. Garrett
  • Publication number: 20230386795
    Abstract: Disclosed herein are surface coatings for plasma components that have the benefit of being robust against chemical recombination rates for active oxygen, nitrogen, fluorine, and hydrogen species when compared with other known surface treat ments. The coatings can be applied to any plasma system component not requiring etching or plasma cleaning including but not limited to materials like quartz, aluminum, or anodized aluminum. Additionally, the efficiency of the system is increased by applying a non-reactive coating to system components thereby increasing the flow of excited plasma species to the plasma chamber of the system.
    Type: Application
    Filed: August 4, 2023
    Publication date: November 30, 2023
    Inventor: Carlo Waldfried
  • Publication number: 20230337407
    Abstract: A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.
    Type: Application
    Filed: April 5, 2023
    Publication date: October 19, 2023
    Inventors: Yuxuan Liu, Zhifeng Li, Carlo Waldfried, Yan Liu, Chandra Venkatraman, Pushkara Rao Varanasi
  • Patent number: 11772127
    Abstract: Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.
    Type: Grant
    Filed: July 18, 2022
    Date of Patent: October 3, 2023
    Assignee: ENTEGRIS, INC.
    Inventors: Yan Liu, Yuxuan Liu, Chandra Venkatraman, Carlo Waldfried
  • Patent number: 11764037
    Abstract: Disclosed herein are surface coatings for plasma components that have the benefit of being robust against chemical and plasma physical attack in aggressive (e.g., fluorine-based) plasma environments. The coatings also provide low plasma surface recombination rates for active oxygen, nitrogen, fluorine, and hydrogen species when compared with other known surface treatments. The coatings can be applied to any plasma system component not requiring etching or plasma cleaning including but not limited to materials like quartz, aluminum, or anodized aluminum. Additionally, the efficiency of the system is increased by applying a non-reactive coating to system components thereby increasing the flow of excited plasma species to the plasma chamber of the system.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: September 19, 2023
    Assignee: ENTEGRIS, INC.
    Inventor: Carlo Waldfried
  • Publication number: 20230287564
    Abstract: A device which can be exposed to chemical vapors, such as a molybdenum vapor, a tungsten vapor, or any combination thereof, which has a coating covering at least a portion thereof. The coating reduces or inhibits mass change at an outer surface of the device from exposure to the vapor. In certain situations, the mass change is a mass gain, and the coating reduces or inhibits the mass gain of equal to or less than 1×10?5 g mm?2.
    Type: Application
    Filed: March 7, 2023
    Publication date: September 14, 2023
    Inventors: Bryan C. Hendrix, Scott L. Battle, Benjamin R. Garrett, Carlo Waldfried, Gavin Richards
  • Publication number: 20230274967
    Abstract: Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, the electrostatic chuck including a pattern of charge dissipation lines on an insulating layer, the lines having a first conductive layer and a second conductive layer and being arranged to define enclosed fields of the insulating layer between the lines.
    Type: Application
    Filed: February 24, 2023
    Publication date: August 31, 2023
    Inventors: Jakub Rybczynski, Steven Donnell, Yan Liu, Caleb Minsky, Chandra Venkatraman, Carlo Waldfried
  • Patent number: 11713504
    Abstract: Described are multi-layer coatings, substrates (i.e., articles) coated with a multi-layer coating, and methods of preparing a multi-layer coating by atomic layer deposition, wherein the coating includes layers alumina and yttria.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: August 1, 2023
    Assignee: ENTEGRIS, INC.
    Inventors: I-Kuan Lin, Carlo Waldfried, Chandrasekaran Venkatraman
  • Publication number: 20230097687
    Abstract: Some embodiments relate to additive manufactured articles having coated surfaces and related methods. The methods may comprise forming a three-dimensional (3D) article by additive manufacturing to obtain an additive manufactured 3D article having a monolithic structure that is not capable of construction by machining, and exposing the additive manufactured 3D article to one or more precursor gases to form a coating layer on a surface of the additive manufactured 3D article. The additive manufactured articles may comprise an additive manufactured three-dimensional (3D) body. The additive manufactured 3D body may have a monolithic structure that is not capable of construction by machining. The additive manufactured 3D body may have a coating layer on a surface of the additive manufactured 3D body.
    Type: Application
    Filed: September 22, 2022
    Publication date: March 30, 2023
    Inventor: Carlo Waldfried
  • Publication number: 20230100791
    Abstract: Some embodiments relate to articles having removable coatings. The articles may comprise a substrate and a coating on the substrate. An etch stop layer may be provided between the substrate and the coating to permit removal of the coating without damaging the substrate. Some embodiments relate to methods for removing a coating from an article. The methods may comprise obtaining an article comprising an etch stop layer between a substrate and a coating on the substrate, and removing at least a portion of the coating from the article. Other embodiments further provide articles and related methods.
    Type: Application
    Filed: September 22, 2022
    Publication date: March 30, 2023
    Inventor: Carlo Waldfried
  • Publication number: 20230093910
    Abstract: Some embodiments relate to additive manufactured articles having passivated surfaces and related methods. The methods may comprise forming a three-dimensional (3D) article by additive manufacturing to obtain an additive manufactured 3D article comprising a magnesium component. The method may further comprise exposing the additive manufactured 3D article to a reactive gas phase comprising a fluorine component. The fluorine component from the reactive gas phase may react with the magnesium component of the additive manufactured 3D article to form a passivation layer at and below a surface of the additive manufacture 3D article.
    Type: Application
    Filed: September 22, 2022
    Publication date: March 30, 2023
    Inventor: Carlo Waldfried
  • Publication number: 20230084930
    Abstract: Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.
    Type: Application
    Filed: September 14, 2022
    Publication date: March 16, 2023
    Inventors: Carlo Waldfried, Jakub Rybczynski, Florentina Popa, Murat Yaldizli
  • Publication number: 20230042148
    Abstract: Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.
    Type: Application
    Filed: July 18, 2022
    Publication date: February 9, 2023
    Inventors: Yan Liu, Yuxuan Liu, Chandra Venkatraman, Carlo Waldfried