Abstract: The invention represents an improved method of measuring trenches on semiconductor wafers with optical spectroscopy. According to the described method, it is possible to characterize not only depth but also shape of the trench. The advancement is achieved by improved Effective Medium Approximation-based modeling of the optical response of trench structures.

Abstract: The invention represents an improved method of measuring trenches on semiconductor wafers with optical spectroscopy. According to the described method, it is possible to characterize not only depth but also shape of the trench. The advancement is achieved by improved Effective Medium Approximation-based modeling of the optical response of trench structures.

Abstract: Methods and systems are provided for writing a magnetic servo track. In one example, a system includes a head assembly having first and second write elements, and a controller. The controller operable to receive a position signal associated with a position of the magnetic storage medium and energize the first write element to write a first magnetic servo pattern (e.g., repeating servo frames including a tone field). The controller is further operable to energize the second write element to write a second magnetic servo pattern (e.g., a mid-frame mark) at least partially overlapping the first pattern, wherein the relative position of the second pattern is adjusted in response to the position signal. The second pattern may be displaced relative to the first pattern in response to a lateral displacement of the magnetic storage medium to maintain a desired center line condition of the servo track.

Abstract: The present invention is a method for providing a disk of an optical tester. The disk comprises a transparent substrate that has a first surface and an opposite second surface. The disk also includes a coating on the first surface of the transparent substrate. An identical coating can be applied to the second surface of the transparent substrate. The coating can have multiple layers of thin films. The present invention provides a method to determine the required thickness of the coating to enhance the sensitivity of zero flying height measurement.

Abstract: The present invention is a method for providing a disk of an optical tester. The disk comprises a transparent substrate that has a first surface and an opposite second surface. The disk also includes a coating on the first surface of the transparent substrate. An identical coating can be applied to the second surface of the transparent substrate. The coating can have multiple layers of thin films. The present invention provides a method to determine the required thickness of the coating to enhance the sensitivity of zero flying height measurement.

Abstract: An apparatus that can measure a space between a first surface and a second surface such as the air bearing between a slider and a disk. The apparatus may include a light source that can reflect a light beam from the slider and the disk. By way of example, the light beam can be reflected off of an Al2O3 cap of a slider. A birefringent element such as a Savart plate may split the reflected light beam into an ordinary beam and an extraordinary beam. The ordinary and extraordinary beams may combine to form an interference pattern that is detected by a photodetector. A controller receives data from the photodetector. The apparatus may have a mechanism which can vary a phase between the ordinary and extraordinary beams so that the controller can calculate a phase value &phgr;. The controller then computes the space from the phase value &phgr;. The variation in phase between the beams may be created by tilting the birefringent element, or moving the reflected light beam directed into the birefringent element.

Abstract: An apparatus that can measure a space between a first surface and a second surface. The apparatus may include a light source that can reflect a light beam from the first and second surfaces. A birefringent element may split the reflected light beam into an ordinary beam and an extraordinary beam. The ordinary and extraordinary beams are detected by a photodetector. The apparatus may include a controller that is coupled to the photodetector and which can compute the space from a phase value that is determined from data collected when the mechanism varies the phase between the ordinary and extraordinary beams, and a ratio between a first modulation amplitude detected from light reflected from the first and second surfaces and a second modulation amplitude detected from light reflected from the first surface when the second surface is not adjacent to the first surface. The ratio can also be used to compute the reflectance and index of refraction of the second surface.

Abstract: A calibration medium that is used to calibrate a flying height tester which measures the gap of an air bearing formed between a magnetic recording head and a substrate. The medium contains a first ridge and a second ridge that extend from an underlying substrate. The ridges may be coated with a reflective material. A flying height tester can be calibrated by measuring light reflected from each ridge. The ridges have varying thicknesses so that the calibration medium will produce multiple data points.