Abstract: Methods for preparing waterborne heat seal coating compositions are disclosed, including (A) melt blending an ethylene vinyl acetate copolymer, a tackifier, and a wax in a first mixing apparatus to form a melt blend, (B) contacting the melt blend with an initial aqueous stream comprising a neutralizing agent, water, and a surfactant in an emulsification zone of the second mixing apparatus to form a dispersion, and (C) diluting the dispersion with water in a dilution zone of the second mixing apparatus to form the waterborne heat seal coating composition.

Abstract: Methods and apparatus for etching a high aspect ratio feature in a stack on a substrate are provided. The feature may be formed in the process of forming a 3D NAND device. Typically, the stack includes alternating layers of material such as silicon oxide and silicon nitride or silicon oxide and polysilicon. WF6 is provided in the etch chemistry, which substantially reduces or eliminates problematic sidewall notching. Advantageously, this improvement in sidewall notching does not introduce other tradeoffs such as increased bowing, decreased selectivity, increased capping, or decreased etch rate.

Abstract: Methods for preparing waterborne heat seal coating compositions are disclosed, including (A) melt blending an ethylene vinyl acetate copolymer, a tackifier, and a wax in a first mixing apparatus to form a melt blend, (B) contacting the melt blend with an initial aqueous stream comprising a neutralizing agent, water, and a surfactant in an emulsification zone of the second mixing apparatus to form a dispersion, and (C) diluting the dispersion with water in a dilution zone of the second mixing apparatus to form the waterborne heat seal coating composition.