Patents by Inventor Carlos Mazure
Carlos Mazure has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8455938Abstract: The present invention relates to a semiconductor device that has a semiconductor-on-insulator (SeOI) structure, which includes a substrate, an insulating layer such as an oxide layer on the substrate and a semiconductor layer on the insulating layer with a field-effect-transistor (FET) formed in the SeOI structure from the substrate and deposited layers, wherein the FET has a channel region in the substrate, a gate dielectric layer that is made from at least a part of the oxide layer of the SeOI structure; and a gate electrode that is formed at least partially from a part of the semiconductor layer of the SeOI structure. The invention further relates to a method of forming one or more field-effect-transistors or metal-oxide-semiconductor transistors from a semiconductor-on-insulator structure that involves patterning and etching the SeOI structure, forming shallow trench isolations, depositing insulating, metal or semiconductor layers, and removing mask and/or pattern layers.Type: GrantFiled: September 20, 2010Date of Patent: June 4, 2013Assignee: SoitecInventors: Bich-Yen Nguyen, Carlos Mazure, Richard Ferrant
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Patent number: 8432216Abstract: The invention provides a data-path cell specifically adapted to its environment for use in an integrated circuit produced on a semiconductor-on-insulator (SeOI) substrate. The data-path cell includes an array of field-effect transistors, each transistor having a source region, a drain region and a channel region formed in the thin semiconductor layer of the SeOI substrate, and further having a front gate control region formed above the channel region. In particular, one or more transistors of the data-path cell further includes a back gate control region formed in the bulk substrate beneath the channel region and configured so as to modify the performance characteristics of the transistor in dependence on its state of bias. Also, an integrated circuit including one or more of the data-path cells and methods for designing or driving these data-path cells.Type: GrantFiled: January 14, 2011Date of Patent: April 30, 2013Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant
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Patent number: 8384425Abstract: This invention provides a semiconductor device structure formed on a conventional semiconductor-on-insulator (SeOI) substrate and including an array of patterns, each pattern being formed by at least one field-effect transistor, each FET transistor having, in the thin film, a source region, a drain region, a channel region, and a front control gate region formed above the channel region. The provided device further includes at least one FET transistor having a pattern including a back control gate region formed in the base substrate beneath the channel region, the back gate region being capable of being biased in order to shift the threshold voltage of the transistor to simulate a modification in the channel width of the transistor or to force the transistor to remain off or on whatever the voltage applied on its front control gate. This invention also provides methods of operating such semiconductor device structures.Type: GrantFiled: December 6, 2010Date of Patent: February 26, 2013Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant
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Publication number: 20130029474Abstract: A method for transferring a monocrystalline semiconductor layer onto a support substrate by implanting species in a donor substrate; bonding the donor substrate to the support substrate; and fracturing the donor substrate to transfer the layer onto the support substrate; wherein a portion of the monocrystalline layer to be transferred is rendered amorphous, without disorganizing the crystal lattice of a second portion of the layer, with the portions being, respectively, a surface portion and a buried portion of the monocrystalline layer; and wherein the amorphous portion is recrystallized at a temperature below 500° C., with the crystal lattice of the second portion serving as a seed for recrystallization.Type: ApplicationFiled: July 26, 2012Publication date: January 31, 2013Applicant: SOITECInventors: Gweltaz Gaudin, Carlos Mazure
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Patent number: 8358552Abstract: A sense amplifier for a series of cells of a memory, including a writing stage comprising a CMOS inverter, the input of which is directly or indirectly connected to an input terminal of the sense amplifier, and the output of which is connected to an output terminal of the sense amplifier intended to be connected to a local bitline addressing the cells of the series, and a reading stage that includes a sense transistor, the gate of which is connected to the output of the inverter and the drain of which is connected to the input of the inverter.Type: GrantFiled: May 27, 2010Date of Patent: January 22, 2013Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
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Publication number: 20130015442Abstract: Methods of forming semiconductor structures include transferring a portion (116a) of a donor structure to a processed semiconductor structure (102) that includes at least one non-planar surface. An amorphous film (144) may be formed over at least one non-planar surface of the bonded semiconductor structure, and the amorphous film may be planarized to form one or more planarized surfaces. Semiconductor structures include a bonded semiconductor structure having at least one non-planar surface, and an amorphous film disposed over the at least one non-planar surface. The bonded semiconductor structure may include a processed semiconductor structure and a portion of a single crystal donor structure attached to a non-planar surface of the processed semiconductor structure.Type: ApplicationFiled: February 22, 2011Publication date: January 17, 2013Applicant: SOITECInventors: Carlos Mazure, Bich-Yen Nguyen, Mariam Sadaka
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Patent number: 8325506Abstract: The invention provides a content-addressable memory cell formed by two transistors that are configured so that one of the transistors is for storing a data bit and the other for is storing the complement of the data bit. Each transistor has a back control gate that can be controlled to block the associated transistor. The device also includes a comparison circuit that is configured to operate the first and second transistors in read mode while controlling the back control gate of each of the transistors so as to block the passing transistor if a proposed bit and the stored bit correspond. Then, the presence or absence of current on a source line linked to the source of each of the transistors indicates whether the proposed bit and the stored bit are identical or not. The invention also provides methods for operating the content-addressable memory cells of this invention, as well as content-addressable memories having a plurality of the content-addressable memory cells of this invention.Type: GrantFiled: December 21, 2010Date of Patent: December 4, 2012Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant
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Patent number: 8309426Abstract: The present invention provides methods for the manufacture of a trench structure in a multilayer wafer that comprises a substrate, an oxide layer on the substrate and a semiconductor layer on the oxide layer. These methods include the steps of forming a trench through the semiconductor layer and the oxide layer and extending into the substrate, and of performing an anneal treatment of the formed trench such that at the inner surface of the trench some material of the semiconductor layer flows at least over a portion of the part of the oxide layer exposed at the inner surface of the trench. Substrates manufactured according to this invention are advantageous for fabricating various semiconductor devices, e.g., MOSFETs, trench capacitors, and the like.Type: GrantFiled: April 25, 2011Date of Patent: November 13, 2012Assignee: SoitecInventors: Konstantin Bourdelle, Carlos Mazure
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Patent number: 8304833Abstract: The invention provides various embodiments of a memory cell formed on a semiconductor-on-insulator (SeOI) substrate and comprising one or more FET transistors. Each FET transistor has a source region and a drain region at least portions of which are arranged in the thin layer of the SeOI substrate, a channel region in which a trench is made, and a gate region formed in the trench. Specifically, the source, drain and channel regions also have portions which are arranged also beneath the insulating layer of the SeOI substrate; the portion of channel region beneath the insulating layer extends between the portions of the source and drain regions also beneath the insulating layer; and the trench in the channel region extends into the depth of the base substrate beyond the insulating layer. Also, methods for fabricating such memory cells and memory arrays including a plurality of such memory cells.Type: GrantFiled: December 21, 2010Date of Patent: November 6, 2012Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant
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Patent number: 8305803Abstract: The invention relates to a memory cell having an FET transistor with a source, a drain and a floating body between the source and the drain, and an injector that can be controlled to inject a charge into the floating body of the FET transistor. The injector includes a bipolar transistor having an emitter, a base and a collector formed by the body of the FET transistor. Specifically, in the memory cell, the emitter of the bipolar transistor is arranged so that the source of the FET transistor serves as the base for the bipolar transistor. The invention also includes a memory array comprising a plurality of memory cells according to the first aspect of the invention, and to methods of controlling such memory cells.Type: GrantFiled: November 9, 2010Date of Patent: November 6, 2012Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant
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Publication number: 20120250444Abstract: A circuit made on a semiconductor-on-insulator substrate. The circuit includes a first transistor having a first channel, a second transistor having a second channel, with the transistors provided in serial association between first and second terminals for applying a power supply potential, each of the transistors comprising a drain region and a source region in the thin layer, a channel extending between the source region and the drain region, and a front control gate located above the channel. Each transistor has a back control gate formed in the base substrate below the channel of the transistor and capable of being biased in order to modulate the threshold voltage of the transistor. At least one of the transistors is configured for operating in a depletion mode under the action of a back gate signal which will sufficiently modulate its threshold voltage.Type: ApplicationFiled: June 13, 2012Publication date: October 4, 2012Applicant: SoitecInventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
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Publication number: 20120243360Abstract: A semiconductor memory having bit lines and wordlines crossing each other, a memory cell array formed by memory cells arranged in rows and columns on crossover points of the bit lines and wordlines, and sense amplifier banks arranged on opposite sides of the memory cell array. Each sense amplifier bank has staggered sense amplifiers connected to a bit line according to an interleaved arrangement whereby bit lines alternate in the direction of the wordlines between bit lines coupled to different sense amplifiers. This results in interconnect spaces parallel to the bit lines. Also, each sense amplifier bank includes a local column decoder for selecting a sense amplifier and which is staggered with the sense amplifiers and coupled to the sense amplifier by an output line running in an available interconnect space parallel to the bit lines.Type: ApplicationFiled: March 16, 2012Publication date: September 27, 2012Inventors: Richard Ferrant, Gerhard Enders, Carlos Mazure
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Publication number: 20120231606Abstract: The present invention relates to a method for providing a Silicon-On-Insulator (SOI) stack that includes a substrate layer, a first oxide layer on the substrate layer and a silicon layer on the first oxide layer (BOX layer). The method includes providing at least one first region of the SOI stack wherein the silicon layer is thinned by thermally oxidizing a part of the silicon layer and providing at least one second region of the SOI stack wherein the first oxide layer (BOX layer) is thinned by annealing.Type: ApplicationFiled: March 9, 2012Publication date: September 13, 2012Inventors: Bich-Yen Nguyen, Carlos Mazure, Richard Ferrant
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Publication number: 20120214291Abstract: A method for relaxing a layer of a strained material. The method includes depositing a first low-viscosity layer on a first face of a strained material layer; bonding a first substrate to the first low-viscosity layer to form a first composite structure; subjecting the composite structure to heat treatment sufficient to cause reflow of the first low-viscosity layer so as to at least partly relax the strained material layer; and applying a mechanical pressure to a second face of the strained material layer wherein the second face is opposite to the first face and with the mechanical pressure applied perpendicularly to the strained material layer during at least part of the heat treatment to relax the strained material.Type: ApplicationFiled: April 27, 2012Publication date: August 23, 2012Applicant: SOITECInventors: Fabrice Letertre, Carlos Mazure, Michael R. Krames, Melvin B. McLaurin, Nathan F. Gardner
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Patent number: 8241942Abstract: A method of fabricating a back-illuminated image sensor that includes the steps of providing a first substrate of a semiconductor layer, in particular a silicon layer, forming electronic device structures over the semiconductor layer and, only then, doping the semiconductor layer. By doing so, improved dopant profiles and electrical properties of photodiodes can be achieved such that the final product, namely an image sensor, has a better quality.Type: GrantFiled: September 22, 2009Date of Patent: August 14, 2012Assignee: SoitecInventors: Konstantin Bourdelle, Carlos Mazure
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Publication number: 20120181609Abstract: The present invention relates to a method for the manufacture of a semiconductor device by providing a first substrate; providing a doped layer in a surface region of the first substrate; providing a buried oxide layer on the doped layer; providing a semiconductor layer on the buried oxide layer to obtain a semiconductor-on-insulator (SeOI) wafer; removing the buried oxide layer and the semiconductor layer from a first region of the SeOI wafer while maintaining the buried oxide layer and the semiconductor layer in a second region of the SeOI water; providing an upper transistor in the second region by forming a back gate in or by the doped layer; and providing a lower transistor in the first region by forming source and drain regions in or by the doped layer.Type: ApplicationFiled: November 28, 2011Publication date: July 19, 2012Inventors: Gerhard Enders, Wolfgang Hoenlein, Franz Hofman, Carlos Mazure
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Patent number: 8223582Abstract: A circuit made on a semiconductor-on-insulator substrate. The circuit includes a first transistor having a first channel, a second transistor having a second channel, with the transistors provided in serial association between first and second terminals for applying a power supply potential, each of the transistors comprising a drain region and a source region in the thin layer, a channel extending between the source region and the drain region, and a front control gate located above the channel. Each transistor has a back control gate formed in the base substrate below the channel of the transistor and capable of being biased in order to modulate the threshold voltage of the transistor. At least one of the transistors is configured for operating in a depletion mode under the action of a back gate signal which will sufficiently modulate its threshold voltage.Type: GrantFiled: June 3, 2010Date of Patent: July 17, 2012Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
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Patent number: 8173512Abstract: A method for forming a structure that includes a relaxed or pseudo-relaxed layer on a substrate. The method includes the steps of growing an elastically stressed layer of semiconductor material on a donor substrate; forming a glassy layer of a viscous material on the stressed layer; removing a portion of the donor substrate to form a structure that includes the glassy layer, the stressed layer and a surface layer of donor substrate material; patterning the stressed layer; and heat treating the structure at a temperature of at least a viscosity temperature of the glassy layer to relax the stressed layer and form the relaxed or pseudo-relaxed layer of the structure.Type: GrantFiled: April 5, 2011Date of Patent: May 8, 2012Assignee: SoitecInventors: Bruno Ghyselen, Carlos Mazure, Emmanuel Arene
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Publication number: 20110294277Abstract: The present invention provides methods for the manufacture of a trench structure in a multilayer wafer that comprises a substrate, an oxide layer on the substrate and a semiconductor layer on the oxide layer. These methods include the steps of forming a trench through the semiconductor layer and the oxide layer and extending into the substrate, and of performing an anneal treatment of the formed trench such that at the inner surface of the trench some material of the semiconductor layer flows at least over a portion of the part of the oxide layer exposed at the inner surface of the trench. Substrates manufactured according to this invention are advantageous for fabricating various semiconductor devices, e.g., MOSFETs, trench capacitors, and the like.Type: ApplicationFiled: April 25, 2011Publication date: December 1, 2011Inventors: Konstantin Bourdelle, Carlos Mazure
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Publication number: 20110287571Abstract: A method of fabricating a back-illuminated image sensor that includes the steps of providing a first substrate of a semiconductor layer, in particular a silicon layer, forming electronic device structures over the semiconductor layer and, only then, doping the semiconductor layer. By doing so, improved dopant profiles and electrical properties of photodiodes can be achieved such that the final product, namely an image sensor, has a better quality.Type: ApplicationFiled: September 22, 2009Publication date: November 24, 2011Applicant: S.O.I.TEC Silicon On Insulator TechnologiesInventors: Konstantin Bourdelle, Carlos Mazure