Patents by Inventor Carmen A. Maxim

Carmen A. Maxim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for routing wafer pods to allow parallel processing
    Patent number: 8275478
    Abstract: A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: September 25, 2012
    Assignee: Globalfoundries Inc.
    Inventors: Diwaskar Adhikari, Raymond G. Goss, Carmen A. Maxim, Jan Rothe
  • METHOD AND APPARATUS FOR ROUTING WAFER PODS TO ALLOW PARALLEL PROCESSING
    Publication number: 20100232914
    Abstract: A method includes designating a plurality of wafers as members of a group. A first subset of the wafers is housed in a first wafer pod and a second subset of the wafers is housed in a second wafer pod. The first wafer pod is routed to a first tool, and at least a first operation is performed on the wafers in the first subset using the first tool. The second wafer pod is routed to a second tool, and the first operation is performed on the wafers in the second subset using the second tool. The wafers in the first and second subsets are consolidated following the performing of the first operation.
    Type: Application
    Filed: March 13, 2009
    Publication date: September 16, 2010
    Inventors: Diwaskar Adhikari, Raymond G. Goss, Carmen A. Maxim, Jon Rothe
  • METHOD AND APPARATUS FOR SCHEDULING MATERIAL TRANSPORT IN A SEMICONDUCTOR MANUFACTURING FACILITY
    Publication number: 20080125900
    Abstract: The present invention provides a method, an apparatus, and a semiconductor manufacturing facility. The method includes receiving a request to move material from a first location to a second location in the semiconductor manufacturing facility, accessing information indicative of a duration of the move from the first location to the second location, and scheduling the requested move based on the information indicative of the duration of the move.
    Type: Application
    Filed: September 15, 2006
    Publication date: May 29, 2008
    Inventors: Carmen A. Maxim, Achim Felber