Patents by Inventor Carmen Lapid Morales

Carmen Lapid Morales has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated periodic focus and exposure calibration of a lithography stepper
    Patent number: 6501534
    Abstract: The present invention is directed to a system and a method for calibrating a lithography stepper system. The system includes a lithography stepper system, measurement system such as a scatterometry system, and a processor for correlating an ideal “golden standard” characterization signature to a test structure characterization data set, based on a plurality of focus and exposure conditions.
    Type: Grant
    Filed: April 30, 2001
    Date of Patent: December 31, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan, Carmen Lapid Morales