Patents by Inventor Carol A. Crosson

Carol A. Crosson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composition and method for forming a doped oxide film
    Patent number: 4152286
    Abstract: A boron doped, silicon oxide-forming film is produced on a semiconductor wafer by coating the wafer with a solution of a silicon compound and a boron compound, in a blend of two polar organic solvents, one of which has a low boiling point, and the other has a high boiling point, between 185.degree. and 300.degree. C. During a subsequent heating step, the high boiling point solvent redissolves any crystalline precipitate that forms during spin-on, giving a more uniform film for diffusion, and consequently a damage-free wafer surface.
    Type: Grant
    Filed: September 13, 1977
    Date of Patent: May 1, 1979
    Assignee: Texas Instruments Incorporated
    Inventors: Carol A. Crosson, Terry L. Brewer, Robert F. Aycock