Patents by Inventor Carol E. Gustafson

Carol E. Gustafson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer carrier assembly
    Patent number: 6030487
    Abstract: A wafer carrier assembly including a subassembly for in-situ nondestructive pad conditioning, characterized by continuously cleansing the pad surface with an energized fluid. The fluid may be abrasive in nature, such as a slurry, or non-abrasive, such as DeIonized (DI) water. In addition, the fluid may be of a type known to assist in removing slurry and/or residual materials from a pad surface and followed by a DI water rinse. The chemical may be either liquid or gas.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: February 29, 2000
    Assignee: International Business Machines Corporation
    Inventors: Thomas R. Fisher, Jr., Carol E. Gustafson, Michael F. Lofaro