Abstract: Compact low NOx gas burner apparatus and methods for discharging fuel gas and air mixtures into furnace spaces wherein the mixture is burned in folded flame patterns and flue gases having low NOx content are formed are provided. A burner apparatus of the invention is basically comprised of a housing having a burner tile attached thereto and means for introducing air therein. The burner tile has an opening therein with a wall surrounding the opening which extends into a furnace space. The exterior sides of the wall are divided into sections by radially positioned baffles with alternate sections having the same or different heights and slanting towards the opening at the same or different angles. Primary fuel gas mixed with flue gases and air is discharged through the burner tile. Secondary fuel gas is discharged adjacent to the external slanted wall sections whereby the secondary fuel gas mixes with flue gases in the furnace space.

Abstract: Anti-swirl baffles are provided in a mass transfer column to reduce the swirling motion of a vapor or mixed phase feed stream introduced into the column. The column is of the type having an upper region of a preselected diameter, a lower region of reduced diameter, and an intermediate transition region that has a diameter that transitions from the preselected diameter of the upper region to the reduced diameter of the lower region. The column includes a vapor or mixed phase feed nozzle and a feed device such as a vapor horn located at least partially within the upper region for delivering the vapor or mixed phase feed stream into the column. The anti-swirl baffles are positioned in the intermediate transition region of the column to disrupt the swirling motion of the vapor or mixed phase feed stream as portions of it descend from the feed device into the transition region of the column.

Abstract: A mass transfer column includes a feed device that is used to de-entrain liquid and more uniformly distribute vapor across a horizontal cross section of the column after a vapor or mixed phase stream has been directed into the column through a radially oriented feed nozzle. The feed device includes an annular passageway formed in the spacing between the column shell and an inner wall spaced inwardly from the shell. A deflector with oppositely directed deflecting surfaces is positioned at an inlet from the feed nozzle to the annular passageway and splits the vapor or mixed phase stream into two roughly equal streams that flow in opposite circumferential directions in the annular passageway. At least one pair of turning vanes is spaced on opposite sides of the deflecting surfaces in the annular passageway to create subpassages through which the vapor or mixed phase stream flows.

Abstract: A mass transfer column includes a feed device that is used to de-entrain liquid and more uniformly distribute vapor across a horizontal cross section of the column after a vapor or mixed phase stream has been directed into the column through a radially oriented feed nozzle. The feed device includes an annular passageway formed in the spacing between the column shell and an inner wall spaced inwardly from the shell. A deflector with oppositely directed deflecting surfaces is positioned at an inlet from the feed nozzle to the annular passageway and splits the vapor or mixed phase stream into two roughly equal streams that flow in opposite circumferential directions in the annular passageway. At least one pair of turning vanes is spaced on opposite sides of the deflecting surfaces in the annular passageway to create subpassages through which the vapor or mixed phase stream flows.

Abstract: A burner assembly for a furnace or like device having a firebox defining a combustion zone. The burner assembly includes a first annular tile defining a centrally located path for a flow of combustion air and a second annular tile concentric with the first annular tile. The second annular tile has an internal diameter which is larger than an external diameter of said first annular tile, and the second annular tile is positioned in surrounding relationship relative to at least a portion of said first annular tile so that a ring-shaped conduit is defined therebetween. The tiles are adapted for placement in the combustion zone of the furnace with the conduit in direct fluid communication with flue gases surrounding the combustion zone. The arrangement is such that combustion air flowing along said path induces a flow of flue gas through the conduit for entrainment by the flow of combustion air.

Abstract: Anti-swirl baffles are provided in a mass transfer column to reduce the swirling motion of a vapor or mixed phase feed stream introduced into the column. The column is of the type having an upper region of a preselected diameter, a lower region of reduced diameter, and an intermediate transition region that has a diameter that transitions from the preselected diameter of the upper region to the reduced diameter of the lower region. The column includes a vapor or mixed phase feed nozzle and a feed device such as a vapor horn located at least partially within the upper region for delivering the vapor or mixed phase feed stream into the column. The anti-swirl baffles are positioned in the intermediate transition region of the column to disrupt the swirling motion of the vapor or mixed phase feed stream as portions of it descend from the feed device into the transition region of the column.

Abstract: Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.

Abstract: Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in communication with the vaporization purification bed to provide a liquefied gas to the bed with an ultra-pure chemical gas generated in the purification bed. The purified gas is subsequently routed to a buffer tank and to a point of use therefrom.

Abstract: A burner assembly for a furnace or like device having a firebox defining a combustion zone. The burner assembly includes a first annular tile defining a centrally located path for a flow of combustion air and a second annular tile concentric with the first annular tile. The second annular tile has an internal diameter which is larger than an external diameter of said first annular tile, and the second annular tile is positioned in surrounding relationship relative to at least a portion of said first annular tile so that a ring-shaped conduit is defined therebetween. The tiles are adapted for placement in the combustion zone of the furnace with the conduit in direct fluid communication with flue gases surrounding the combustion zone. The arrangement is such that combustion air flowing along said path induces a flow of flue gas through the conduit for entrainment by the flow of combustion air.

Abstract: Systems and processes are described for sanitizing a food product with ozone gas. The ozone gas is generated using a low pressure, low volume ozone gas generator and is delivered to a fluid injector. The fluid injector receives high pressure carrier fluid from a carrier fluid source and causes the ozone to be entrained in a stream of carrier fluid. The entrainment is created by passing the carrier fluid through a venturi diffuser inside the injector which creates a negative pressure in the sanitizing fluid line, thus drawing the sanitizing fluid into the carrier fluid and creating a highly homogenized fluid jet. The fluid jet is then injected into a container which contains a food product to be sanitized by the ozone. The container may also be provided with a mixing paddle to vigorously mix the food product while the ozone/carrier fluid jet is injected into the food product, which further ensures that the food product is contacted with sanitizing ozone gas.