Patents by Inventor Caroline Demeurisse

Caroline Demeurisse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a self-aligned germanide and devices obtained thereof
    Publication number: 20050196962
    Abstract: A method for removing unreacted metal from a germanium layer, a germanide layer and or a dielectric material. The method includes removing the unreacted metal using a chemical composition that includes one or more hydrohalides, such as in an aqueous form. In certain embodiments, the chemical composition may also include H2SO4. Also, in certain embodiments, the chemical composition may be heated to increase the etch rate of the unreacted metal and/or improve the etch selectivity to the germanium, the germanide and/or the dielectric material.
    Type: Application
    Filed: March 8, 2005
    Publication date: September 8, 2005
    Applicant: Interuniversitair Microelektronica Centrum (IMEC)
    Inventors: Caroline Demeurisse, Karl Opsomer