Patents by Inventor Carolus Johannes Schoormans

Carolus Johannes Schoormans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070132980
    Abstract: A device manufacturing method includes projecting a patterned beam of radiation onto a substrate, wherein the position of a movable object is determined in a number of degrees of freedom using a number of sensors, the number of sensors being larger than the number of degrees of freedom, wherein the position of the movable object in the number of degrees of freedom is determined using signals of each of the sensors, wherein the signals of the sensors are weighed on the basis of the difference between noise levels of each of the sensors. Accuracy of the position measurement of movable object and/or overlay and focus performance are improved in lithographic apparatus.
    Type: Application
    Filed: December 8, 2005
    Publication date: June 14, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Carolus Johannes Schoormans, Emiel Jozef Eussen, Willem Herman Koenen, Nicolas Lallemant, Engelbertus Antonius Van Der Pasch, Johannes Mathias Adriaens