Abstract: Disclosed is a method and apparatus for continuous introduction and exit of workpieces into and out of a vacuum. A first seal is provided between the atmosphere and a first pumping station. This seal comprises compliant members positioned within cavities in a plate so that the pressure differential causes the members to push against the workpiece and the cavity wall to establish a rotating seal. A second seal may also be provided between the first pumping station and the vacuum chabmer. This seal includes compliant members mounted within a series of differentially pumped cavities and providing a low friction seal with the workpiece.

Abstract: A process and apparatus for cleaning then coating articles such as circuit board panels with a metallic coating encompasses an enclosed evacuated chamber having a controlled low pressure gaseous process environment. The articles to be cleaned, then coated with a metallic deposit are continuously fed into the enclosed chamber through an air lock mechanism that permits the evacuated chamber to remain at its predetermined pressure and gaseous composition. Included within the chamber are a plurality of transport paths or panel carrying tracks. The articles to be cleaned, then coated are continuously transported along the various tracks while being coated.The plurality of tracks are positioned to be substantially parallel with each other so that articles on each track follow paths similar in direction and substantially equidistant from one another. A plurality of bidirectional coating sources are sequentially positioned on both sides of each article transport track so that both sides of the panels are coated.