Abstract: An apparatus for heating and cooling an article is provided. The apparatus comprises an enclosure having top, bottom, and side walls and an entrance and an exit. A first belt system comprising one or more belts extends from a loading position through a portion of the enclosure. The first belt system has a loading end and an unloading end. A second belt system comprising one or more belts extends from the unloading end of the first belt system to an unloading position. The second belt system has a loading end and an unloading end. The enclosure includes one or more heating sources positioned adjacent the first belt system for heating the first belt system.

Abstract: An apparatus for heating and cooling an article is provided. The apparatus comprises an enclosure having top, bottom, and side walls and an entrance and an exit. A first belt system comprising one or more belts extends from a loading position through a portion of the enclosure. The first belt system has a loading end and an unloading end. A second belt system comprising one or more belts extends from the unloading end of the first belt system to an unloading position. The second belt system has a loading end and an unloading end. The enclosure includes one or more heating sources positioned adjacent the first belt system for heating the first belt system.

Abstract: An apparatus for heating and cooling an article is provided. The apparatus comprises an enclosure having top, bottom, and side walls and an entrance and an exit. A first belt system comprising one or more belts extends from a loading position through a portion of the enclosure. The first belt system has a loading end and an unloading end. A second belt system comprising one or more belts extends from the unloading end of the first belt system to an unloading position. The second belt system has a loading end and an unloading end. The enclosure includes one or more heating sources positioned adjacent the first belt system for heating the first belt system.

Abstract: A furnace for reflowing solder on a wafer having a heating chamber with an entrance, an exit, and top, bottom, side, and end walls formed of sheets of porous insulation. The furnace has a first belt, with first and second ends, extending from a loading position into the heating chamber. The furnace has a second belt, with first and second ends; the first end of the second belt is coupled to the second end of the first belt, the second belt extending through the heating chamber. The furnace has a third belt with first and second ends; the first end of the third belt is coupled to the second end of the second belt, the third belt extending through the exit of the heating chamber to an unloading position. The heating chamber also has infrared lamps positioned below the second belt, the infrared lamps heat the second belt, such that the second belt heats the wafer situated on the second belt.

Abstract: A furnace for reflowing solder on a wafer having a heating chamber with an entrance, an exit, and top, bottom, side, and end walls formed of sheets of porous insulation. The furnace has a first belt extending from a loading position into and through. the heating chamber. The furnace has a second belt coupled to the first belt, the second belt extending through the exit of the heating chamber to an unloading position. The heating chamber also has infrared lamps positioned below the first belt, the infrared lamps heat the first belt, such that the first belt heats the wafer situated on the first belt.

Abstract: A furnace for reflowing solder on a wafer having a heating chamber with an entrance, an exit, and top, bottom, side, and end walls formed of sheets of porous insulation. The furnace has a first belt extending from a loading position into and through the heating chamber. The furnace has a second belt coupled to the first belt, the second belt extending through the exit of the heating chamber to an unloading position. The heating chamber also has infrared lamps positioned below the first belt, the infrared lamps heat the first belt, such that the first belt heats the wafer situated on the first belt.

Abstract: A thermal processing apparatus for thermally processing a workpiece having a process chamber, a workpiece support positioned inside of the process chamber, a heater positioned inside of the process chamber to heat the workpiece; and an ultraviolet light source positioned inside of the process chamber to irradiate ultraviolet light onto the workpiece.

Abstract: An infrared furnace has a housing with insulated walls defining an elongated straight tunnel disposed on a longitudinal axis between an entrance and an exit. A conveyor continuously moves through the tunnel along the longitudinal axis between the entrance and the exit. A first plurality of elongated tubular infrared heating elements are disposed in the tunnel above the conveyor in spaced apart parallel relationship transverse to the longitudinal axis. A second plurality of tubular elongated infrared heating elements are disposed in the tunnel below the conveyor in spaced apart parallel relationship transverse to the longitudinal axis. The housing has insulated walls each comprising a porous insulative inner panel and a non-porous outer panel. At least one of the outer panels is spaced from its associated inner panel to form a plenum chamber therebetween. The insulated walls define an elongated tunnel in which a source of infrared radiation is disposed.

Abstract: A hazard prevention control circuit is provided for an electric heater having heating coils enclosed in a quartz tube immersed in a tank of solution. A circuit breaker is connected in series with a contactor coil controlling a set of contacts connecting the main lines of a power supply to the heating coils of the heater. Upon sensing a hazard condition, the control circuit causes excess current to flow through the circuit breaker to open the circuit and deenergize the contactor coil so as to open the contacts connecting the power to the heating coils. Transformers are provided for coupling power supplied by the main lines to the control circuit and the contactor coil and for coupling the pulse output of the control circuit to trigger a triac which conducts the excess current through the circuit breaker.

Abstract: A pyrex tank for heating corrosive solutions is formed with a main body portion having an open top and with a small annular cavity portion depending from the bottom of the main body portion. A heater unit comprising a heating element enclosed in a quartz tube is securely mounted in an upright position on a support. The tank is positioned on the support with the central opening of its annular cavity receiving the quartz tube of the heating element. The solution in the main body portion of the tank is heated in the annular cavity portion thereof by convection. A thermocouple supported in an upright position on the support is inserted through the open lower end of an upright tube fixed to the bottom wall of the tank and extending upwardly into the interior thereof.