Patents by Inventor Carsten Thode

Carsten Thode has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge
    Patent number: 7477673
    Abstract: The object of the invention in an arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge is to reduce the time required for charging the electrodes by reducing the inductance of the discharge circuit. A high-voltage power supply connected to the electrodes which are constructed as disk electrodes and are rotatably mounted has a capacitor battery comprising capacitor elements which are arranged along a ring concentric to the axis of rotation of the electrodes with a ring plane directed parallel to the disk surface. Electrical connections are guided to the disk surfaces from the capacitor elements along a ring concentric to the axis of rotation.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: January 13, 2009
    Assignee: XTREME technologies GmbH
    Inventors: Christian Ziener, Guido Hergenhan, Frank Flohrer, Carsten Thode
  • ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON AN ELECTRICALLY OPERATED GAS DISCHARGE
    Publication number: 20070228299
    Abstract: The object of the invention in an arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge is to reduce the time required for charging the electrodes by reducing the inductance of the discharge circuit. A high-voltage power supply connected to the electrodes which are constructed as disk electrodes and are rotatably mounted has a capacitor battery comprising capacitor elements which are arranged along a ring concentric to the axis of rotation of the electrodes with a ring plane directed parallel to the disk surface. Electrical connections are guided to the disk surfaces from the capacitor elements along a ring concentric to the axis of rotation.
    Type: Application
    Filed: March 29, 2007
    Publication date: October 4, 2007
    Inventors: Christian Ziener, Guido Hergenhan, Frank Flohrer, Carsten Thode