Abstract: A shock resistant and mode mixing resistant assembly for oscillating a device such as a MEMS mirror around a pivot axis by means of two pairs of piezoelectric elements or towers is provided. The resistance to mechanical shock and mode mixing is accomplished by mounting the broad faces or width of each piezoelectric element in a chevron shape so that the broad faces or width dimensions are not in parallel or aligned with each other. Mounting the piezoelectric elements so that the broad faces or width dimensions are at a 15 degree angle with respect to a line perpendicular to the pivot axis has been found to be especially effective.

Abstract: A shock resistant and mode mixing resistant assembly for oscillating a device such as a MEMS mirror around a pivot axis by means of two pairs of piezoelectric elements or towers is provided. The resistance to mechanical shock and mode mixing is accomplished by mounting the broad faces or width of each piezoelectric element in a chevron shape so that the broad faces or width dimensions are not in parallel or aligned with each other. Mounting the piezoelectric elements so that the broad faces or width dimensions are at a 15 degree angle with respect to a line perpendicular to the pivot axis has been found to be especially effective.

Abstract: Method and structure for mounting a torsional hinged device, such as a mirror, having a first TCE (thermal coefficient of expansion) on a substrate having a second TCE different than said first TCE. The structure comprising a plurality of compliant support posts between the substrate and the torsional hinged device that deform when the contraction and/or expansion of the torsional hinged device is different than the corresponding contraction and expansion of the substrate.

Abstract: System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.

Abstract: System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil.