Patents by Inventor Caryn J. Johnson

Caryn J. Johnson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wet etching of cured polyimide
    Patent number: 4857143
    Abstract: A fully cured or substantially fully cured polyimide is etched by contacting the imide with an aqueous solution of a metal hydroxide such as an alkali metal or alkali earth hydroxide and a metallic compound selected from metal carbonates, sulfates and phosphates. The presence of the carbonate, sulfate or phosphare reduces the undercutting of a resist pattern on the polyimide.
    Type: Grant
    Filed: December 16, 1988
    Date of Patent: August 15, 1989
    Assignee: International Business Machines Corp.
    Inventors: John J. Glenning, Caryn J. Johnson, Walter P. Pawlowski, Kenneth G. Sakorafos