Patents by Inventor Casey Jon Grant

Casey Jon Grant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS, PHOTOMASKS AND METHODS OF FABRICATING PHOTOMASKS FOR IMPROVING DAMASCENE WIRE UNIFORMITY WITHOUT REDUCING PERFORMANCE
    Publication number: 20120110524
    Abstract: A method of improving damascene wire uniformity without reducing performance. The method includes simultaneously forming a multiplicity of damascene wires and a multiplicity metal dummy shapes in a dielectric layer of a wiring level of an integrated circuit chip, the metal dummy shapes dispersed between damascene wires of the multiplicity of damascene wires; and removing or modifying those metal dummy shapes of the multiplicity of metal dummy shapes within exclusion regions around selected damascene wires of the multiplicity of damascene wires. Also a method of fabricating a photomask and a photomask for use in improving damascene wire uniformity without reducing performance.
    Type: Application
    Filed: January 10, 2012
    Publication date: May 3, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Casey Jon Grant, Jude L. Hankey
  • Methods, photomasks and methods of fabricating photomasks for improving damascene wire uniformity without reducing performance
    Patent number: 8129095
    Abstract: A method of improving damascene wire uniformity without reducing performance. The method includes simultaneously forming a multiplicity of damascene wires and a multiplicity of metal dummy shapes in a dielectric layer of a wiring level of an integrated circuit chip, the metal dummy shapes being dispersed between damascene wires of the multiplicity of damascene wires; and removing or modifying those metal dummy shapes of the multiplicity of metal dummy shapes within exclusion regions around selected damascene wires of the multiplicity of damascene wires. Also a method of fabricating a photomask and a photomask for use in improving damascene wire uniformity without reducing performance.
    Type: Grant
    Filed: November 20, 2009
    Date of Patent: March 6, 2012
    Assignee: International Business Machines Corporation
    Inventors: Casey Jon Grant, Jude L. Hankey
  • Methods, Photomasks and Methods of Fabricating Photomasks for Improving Damascene Wire Uniformity Without Reducing Performance
    Publication number: 20100261095
    Abstract: A method of improving damascene wire uniformity without reducing performance. The method includes simultaneously forming a multiplicity of damascene wires and a multiplicity metal dummy shapes in a dielectric layer of a wiring level of an integrated circuit chip, the metal dummy shapes dispersed between damascene wires of the multiplicity of damascene wires; and removing or modifying those metal dummy shapes of the multiplicity of metal dummy shapes within exclusion regions around selected damascene wires of the multiplicity of damascene wires. Also a method of fabricating a photomask and a photomask for use in improving damascene wire uniformity without reducing performance.
    Type: Application
    Filed: November 20, 2009
    Publication date: October 14, 2010
    Applicant: International Business Machines Corporation
    Inventors: Casey Jon Grant, Jude L. Hankey