Abstract: A surface acoustic wave (SAW) structure is provided. The SAW structure includes an interdigital transducer (IDT) over a first surface of a piezoelectric structure. The IDT includes a first electrode finger and a second electrode finger arranged in parallel along a first direction and at least partially overlapped with each other. The SAW structure also includes a first embedded acoustic reflector in the piezoelectric structure on one side of the IDT along a second direction, and a second embedded acoustic reflector in the piezoelectric structure on another side of the IDT along the second direction. A first surface of each of the first embedded acoustic reflector and the second embedded acoustic reflector is coplanar with the first surface of the piezoelectric structure. A second surface of each of the first embedded acoustic reflector and the second embedded acoustic reflector is located between the first surface and a second surface of the piezoelectric structure.

Abstract: A surface acoustic wave (SAW) device is provided with a piezoelectric substrate, an interdigitated transducer (IDT), and multiple dielectric layers. The IDT is over a top surface of the piezoelectric substrate and comprises first and second electrodes with interdigitated fingers. A first higher k dielectric layer is provided over the IDT, and a first lower k dielectric layer is provided over the first higher k dielectric layer. The dielectric constant of the first higher k dielectric layer is higher than the dielectric constant of the first lower k dielectric layer.

Abstract: Disclosed is a device that includes a crystalline substrate and a patterned aluminum-based material layer disposed onto the crystalline substrate. The patterned aluminum-based material layer has a titanium-alloyed surface. A titanium-based material layer is disposed over select portions of the titanium-alloyed surface. In an exemplary embodiment, the patterned aluminum-based material layer forms a pair of interdigitated transducers to provide a surface wave acoustic (SAW) device. The SAW device of the present disclosure is usable to realize SAW-based filters for wireless communication equipment.

Abstract: Disclosed is a device that includes a crystalline substrate and a patterned aluminum-based material layer disposed onto the crystalline substrate. The patterned aluminum-based material layer has a titanium-alloyed surface. A titanium-based material layer is disposed over select portions of the titanium-alloyed surface. In an exemplary embodiment, the patterned aluminum-based material layer forms a pair of interdigitated transducers to provide a surface wave acoustic (SAW) device. The SAW device of the present disclosure is usable to realize SAW-based filters for wireless communication equipment.

Abstract: Disclosed is a device that includes a crystalline substrate and a patterned aluminum-based material layer disposed onto the crystalline substrate. The patterned aluminum-based material layer has a titanium-alloyed surface. A titanium-based material layer is disposed over select portions of the titanium-alloyed surface. In an exemplary embodiment, the patterned aluminum-based material layer forms a pair of interdigitated transducers to provide a surface wave acoustic (SAW) device. The SAW device of the present disclosure is usable to realize SAW-based filters for wireless communication equipment.

Abstract: Disclosed is a device that includes a crystalline substrate and a patterned aluminum-based material layer disposed onto the crystalline substrate. The patterned aluminum-based material layer has a titanium-alloyed surface. A titanium-based material layer is disposed over select portions of the titanium-alloyed surface. In an exemplary embodiment, the patterned aluminum-based material layer forms a pair of interdigitated transducers to provide a surface wave acoustic (SAW) device. The SAW device of the present disclosure is usable to realize SAW-based filters for wireless communication equipment.

Abstract: Disclosed is a device that includes a crystalline substrate and a patterned aluminum-based material layer disposed onto the crystalline substrate. The patterned aluminum-based material layer has a titanium-alloyed surface. A titanium-based material layer is disposed over select portions of the titanium-alloyed surface. In an exemplary embodiment, the patterned aluminum-based material layer forms a pair of interdigitated transducers to provide a surface wave acoustic (SAW) device. The SAW device of the present disclosure is usable to realize SAW-based filters for wireless communication equipment.