Patents by Inventor Casparus Antonius Juffermans

Casparus Antonius Juffermans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of measuring the performance of an illumination system
    Publication number: 20060215140
    Abstract: The performance of an illumination system in, for example, a lithographic projection apparatus can be measured accurately and reliably by means of a test object (55) comprising at least one Fresnel zone lens (30) and an associated reference mark, preferably a ring (40). By superposed imaging of these and detecting and evaluating the composed image (56), telecentricity errors and aberrations of the illumination can be measured.
    Type: Application
    Filed: December 18, 2003
    Publication date: September 28, 2006
    Inventors: Peter Dirksen, Casparus Antonius Juffermans