Patents by Inventor Catherine A. Fieber

Catherine A. Fieber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of taper-etching with photoresist adhesion layer
    Patent number: 5057186
    Abstract: In a two-step etching process for making tapered contact openings in a dieletric, a thin layer of a material is interposed to serve as an adhesive between the dielectric and a photoresist layer the thin layer of material is chosen to remain essentially intact during undercut partial etching of the dielectric. As a result of enhanced adhesion, the photoresist layer remains more accurately positioned for subsequent anisotropic etching across the remainder of the thickness of the dielectric.
    Type: Grant
    Filed: October 12, 1990
    Date of Patent: October 15, 1991
    Assignee: AT&T Bell Laboratories
    Inventors: Hongzong Chew, Catherine A. Fieber, Graham W. Hills, Edward P. Martin, Jr.