Patents by Inventor Cayetano COBALEDA SÁNCHEZ-FABRÉS

Cayetano COBALEDA SÁNCHEZ-FABRÉS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE EDGE DETECTION
    Publication number: 20190101839
    Abstract: A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.
    Type: Application
    Filed: March 23, 2017
    Publication date: April 4, 2019
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Eric Anthony JANDA, Cayetano COBALEDA SÁNCHEZ-FABRÉS, Bernd Peter GEH, Simon Gijsbert Josephus MATHIJSSEN