Patents by Inventor Cecilia Galarza

Cecilia Galarza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for automated system identification
    Patent number: 6947876
    Abstract: A method for automated system identification of a linear system is disclosed. A model structure is selected and one or more reference signal values are generated for input into the system. Input signal values and output signal values are retrieved from the system and system identification is performed on the model structure using the input signal values, the output signal values, and the one or more reference signal values. A point model, obtained as a result of the system identification, is then verified for accuracy.
    Type: Grant
    Filed: March 10, 2000
    Date of Patent: September 20, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Cecilia Galarza, Dan Hernandez, Mark Erickson
  • Efficient adaptive feedforward periodic disturbance compensation
    Patent number: 6922596
    Abstract: A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.
    Type: Grant
    Filed: August 7, 2003
    Date of Patent: July 26, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Mark A. Erickson, Cecilia Galarza, Dan Hernandez, Sunil C. Shah
  • Efficient adaptive feedforward periodic disturbance compensation
    Publication number: 20040030416
    Abstract: A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.
    Type: Application
    Filed: August 7, 2003
    Publication date: February 12, 2004
    Inventors: Mark A. Erickson, Cecilia Galarza, Dan Hernandez, Sunil C. Shah
  • Efficient adaptive feedforward periodic disturbance compensation
    Patent number: 6684114
    Abstract: A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.
    Type: Grant
    Filed: March 3, 2000
    Date of Patent: January 27, 2004
    Assignee: Tokyo Electron Limited
    Inventors: Mark A. Erickson, Cecilia Galarza, Dan Hernandez, Sunil C. Shah
  • Compensator design optimization through efficient utilization of subcompensators
    Patent number: 6487696
    Abstract: A method and system for designing a compensator for a system is described. A structure of a model set and a compensator set is defined. The defined model set and compensator set is processed. Model set, compensator set, and model subsets are created from the processed model and compensator set. The created model set, compensator set, model subsets are evaluated.
    Type: Grant
    Filed: March 2, 2001
    Date of Patent: November 26, 2002
    Assignee: Voyan Technology
    Inventors: Thorkell Gudmundsson, Mark Erickson, Cecilia Galarza, Dan Hernandez, Tom Pare