Abstract: The invention relates to a vacuum valve having a screw element for coupling a first component of the vacuum valve to a second component. The screw element has a force transfer surface section between a threaded surface section having a first thread and an engagement surface section, arranged in a first gas region, for a tool. The first and second component are coupled by a thread engagement, carried out through a passage hole in the first component, between the first thread and a second thread assigned to the second component. The screw element has a sealing surface section between the threaded surface section and the engagement surface section. Between the sealing surface section and a sealing face of the first component, a sealing seal element is arranged so the first gas region is separated in a gas-tight or particle-tight manner from a third gas region.

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9?, 9?) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9?, 9?) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25?, 26, 26?), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20).

Abstract: A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9?, 9?) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9?, 9?) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25?, 26, 26?), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20).