Abstract: A method for dispensing a viscous liquid onto a rotating, disk-shaped substrate comprises the steps of Positioning the tip of a nozzle for dispensing said viscous liquid at a first distance relative to a surface of said substrate during start of the dispensing, thereby allowing the viscous liquid (4) to make a controlled first contact with the substrate. Then the gap between said nozzle and the surface of said substrate is increased to a second distance during dispensing. Accordingly, an apparatus for dispensing a viscous liquid comprises a nozzle with a tip for dispensing said viscous liquid and means for changing the distance between said nozzle and the surface of said substrate.

Abstract: A method for bonding of disk shaped substrates comprises the steps of providing a first and a second substrate, applying a liquid adhesive to a first bonding surface and a second surface, irradiating the lacquered surface of at least one of the substrates with UV light for increasing the viscosity of the lacquer, joining the substrates in vacuum, irradiating the joined disk with UV light for increasing the viscosity of the lacquer in between the joined disks, placing the disk onto a rotatable chuck, rotating the disc with a rotation speed preferably >500rpm, and finally separating the 2 substrates to leave the full bonding layer on one of the substrates.

Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.

Abstract: In a method for manufacturing an optical storage medium a first 1 and a second circular substrate 2 are being provided and being joined by means of a W curable resin forming an intermediate bonding layer. Then said two bonded substrates are being illuminated with UV light with the exception of the very outer edge of the bonded disc. Afterwards said two bonded disks are being spun and thereby a removal of unwanted resin (adhesive) from the outer edge takes place.

Abstract: A method and device for manufacturing a disc-shaped workpiece comprises the steps of producing a first and second disc-shaped substrate, applying an adhesive on at least one of the flat sides of said first and second substrates, bonding said substrates to form said disc-shaped workpiece and removing an excess of adhesive at the outer rim of the disc shaped workpiece by means of a liquid while rotating the workpiece on a rotating table. The liquid is being dispensed by a supply system comprising one or severeal nozzles, used liquid is collected by a suction device.