Patents by Inventor Cerel MUNOZ

Cerel MUNOZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
    Publication number: 20240286398
    Abstract: Described are techniques and equipment (apparatus) for processing an electrostatic chuck at controlled process conditions, including, as an example, for processing an electrostatic chuck during a step of curing an adhesive that forms a bond between two layers of the electrostatic chuck.
    Type: Application
    Filed: April 25, 2024
    Publication date: August 29, 2024
    Inventors: Chiranjeevi PYDI, Nathan RICHARD, Steven DONNELL, Sara MERCHEL, Caleb MINSKY, Cerel MUNOZ, Yan LIU
  • METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
    Publication number: 20230060192
    Abstract: Described are techniques and equipment (apparatus) for processing an electrostatic chuck at controlled process conditions, including, as an example, for processing an electrostatic chuck during a step of curing an adhesive that forms a bond between two layers of the electrostatic chuck.
    Type: Application
    Filed: August 29, 2022
    Publication date: March 2, 2023
    Inventors: Chiranjeevi PYDI, Nathan RICHARD, Steven DONNELL, Sara MERCHEL, Caleb MINSKY, Cerel MUNOZ, Yan LIU