Patents by Inventor Chad B. Bray

Chad B. Bray has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor component and chemical-mechanical polishing system therefor
    Patent number: 6267641
    Abstract: A method of manufacturing a semiconductor component includes forming a first layer over a semiconductor substrate, providing a mixture comprised of a first component and a second component, optically detecting a concentration of the first component in the mixture, and applying the mixture to the first layer. A chemical-mechanical polishing (CMP) system (100) for use in the method includes a vessel (110) having a first input port (111), a CMP slurry output port (113), and a CMP slurry sensing port (114). The CMP system also includes a refractometer (150) adjacent to the CMP slurry sensing port.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: July 31, 2001
    Assignee: Motorola, Inc.
    Inventors: James F. Vanell, Chad B. Bray