Patents by Inventor Chad Garretson

Chad Garretson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of post CMP defect stability improvement
    Patent number: 6319098
    Abstract: The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
    Type: Grant
    Filed: November 13, 1998
    Date of Patent: November 20, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Thomas H. Osterheld, Peter McKeever, Chad Garretson