Abstract: Method and apparatus for determining a thickness of a deposited material. Energy is passed through the deposited material, wherein some of the energy is transmitted. The transmitted energy is received, and the received energy is used to determine a thickness of the deposited material.

Abstract: A liquid delivery system that is fabricated on a substrate that comprises at least one liquid source and a chamber including a nozzle with an outlet through which liquid is expelled from the system. A micro channel connects the liquid source to the chamber, and a pump transports liquid from a liquid source to the chamber. A moveable member is provided for applying positive pressure to the liquid in the chamber, so as to force a metered amount of liquid through the outlet of the nozzle. A reciprocating mass is operatively connected to the moveable member to move it back and forth. In one embodiment, the moveable member is a generally 3-sided, U-shaped structure having spaced-apart sides, each of which is sized and shaped to fit through the outlet of the nozzle. A third side connects the spaced-apart sides to each other, and the entire structure is reciprocable between a first position inside the chamber and a second position outside the nozzle.