Patents by Inventor Chaemook Lim

Chaemook Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process apparatus including a non-contact thermo-sensor
    Patent number: 11764087
    Abstract: A process apparatus includes a heating module and a supporter disposed below the heating module. A process space is provided between the heating module and the supporter. The heating module includes a housing, at least one heating lamp disposed in the housing, at least one temperature sensor disposed in the housing, and a blocking plate disposed under the housing. The blocking plate spatially separates the at least one heating lamp from the process space, and the blocking plate includes at least one window spatially connecting the at least one temperature sensor to the process space.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: September 19, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chaemook Lim, Yeongrack Son, Ohhyuk Kwon, Dongouk Kim, Youngbum Kim, Woohee Kim, Dongjoon Lee, Kwanghyeon Jeong
  • PROCESS APPARATUS INCLUDING A NON-CONTACT THERMO-SENSOR
    Publication number: 20210183672
    Abstract: A process apparatus includes a heating module and a supporter disposed below the heating module. A process space is provided between the heating module and the supporter. The heating module includes a housing, at least one heating lamp disposed in the housing, at least one temperature sensor disposed in the housing, and a blocking plate disposed under the housing. The blocking plate spatially separates the at least one heating lamp from the process space, and the blocking plate includes at least one window spatially connecting the at least one temperature sensor to the process space.
    Type: Application
    Filed: June 11, 2020
    Publication date: June 17, 2021
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chaemook LIM, Yeongrack SON, Ohhyuk KWON, Dongouk KIM, Youngbum KIM, Woohee KIM, Dongjoon LEE, Kwanghyeon JEONG
  • Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method
    Patent number: 10040192
    Abstract: A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: August 7, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seok Heo, Sun Ho Kim, Chaemook Lim, JaeChul Hwang
  • SUBSTRATE TRANSFER UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD
    Publication number: 20160172224
    Abstract: A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.
    Type: Application
    Filed: December 2, 2015
    Publication date: June 16, 2016
    Inventors: Seok Heo, Sun Ho Kim, Chaemook Lim, JaeChul Hwang