Patents by Inventor Chae-Rock Lim

Chae-Rock Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for soft baking photoresist on substrate
    Patent number: 8148665
    Abstract: An apparatus for soft baking a substrate having a dummy region is provided. The apparatus includes a heating plate, a plurality of pins, and a driving unit for individually lifting selective ones of the plurality of pins so as to protrude from an upper surface of the heating plate.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: April 3, 2012
    Assignee: LG Display Co., Ltd.
    Inventor: Chae-Rock Lim
  • Apparatus and method for soft baking photoresist on substrate
    Publication number: 20060054791
    Abstract: An apparatus for soft baking a substrate having a dummy region is provided. The apparatus includes a heating plate, a plurality of pins, and a driving unit for individually lifting selective ones of the plurality of pins so as to protrude from an upper surface of the heating plate.
    Type: Application
    Filed: June 28, 2005
    Publication date: March 16, 2006
    Inventor: Chae-Rock Lim