Abstract: A method of manufacturing an electronic device, includes: providing a substrate including a plurality of mounting regions on which electronic components are mounted respectively; forming a plurality of vapor passage holes that penetrate the substrate; disposing the electronic components on the substrate via bumps; heating a first heat transfer fluid to generate a second heat transfer fluid in a vapor state; supplying at least a portion of the second heat transfer fluid in the vapor state through the vapor passage holes of the substrate; and soldering the bumps using the at least the portion of the second heat transfer fluid in the vapor state.

Abstract: A semiconductor package includes a substrate including a first layer, a plurality of structures extending in a first direction on the first layer by a first length and including the same materials as the first layer, and a first semiconductor chip bonded to the substrate, wherein a separation distance in the first direction between a first surface of the first semiconductor chip facing the substrate and the substrate is determined by the first length.

Abstract: Provided is a semiconductor package including a substrate including a body having a first surface and a second surface, the first surface and the second surface opposite to each other, a plurality of interconnection patterns arranged in a vertical direction within the body, the plurality of interconnection patterns including upper terminals on the first surface and lower terminals on the second surface, and an induction heating structure within the body, and the induction heating structure spaced apart from the plurality of interconnection patterns, an upper protective layer on the first surface of the substrate and the upper protective layer including first openings respectively exposing the upper terminals, a semiconductor chip on the upper protective layer, and the semiconductor chip including connection pads.

Abstract: A solder reflow apparatus may include a reflow chamber, a heater and a stage. The reflow chamber may be configured to receive a heat transfer fluid. The heat transfer fluid may be configured for transferring heat to a solder for mounting an electronic part on a substrate. The heater may be configured to heat the heat transfer fluid in the reflow chamber. The stage may be in the reflow chamber to support the substrate. The stage may be inclined to a bottom surface of the reflow chamber to induce the heat transfer fluid toward a central portion of the substrate. Thus, the vertically ascended heat transfer fluid may be uniformly applied to the central portion and an edge portion of the substrate so that the solders at the central portion and the edge portion of the substrate may be uniformly soldered.

Abstract: A semiconductor reflow apparatus includes a conveyor comprising a laterally moveable surface configured to move in a first direction, a pickup tool including a head disposed above the conveyor, and an induction heating coil configured to generate a magnetic field in a direction passing through a surface of the conveyor, wherein the pickup tool is further configured to move the head in a vertical direction toward the conveyor.

Abstract: A solder reflow apparatus may include a reflow chamber, a heater and a stage. The reflow chamber may be configured to receive a heat transfer fluid. The heat transfer fluid may be configured for transferring heat to a solder for mounting an electronic part on a substrate. The heater may be configured to heat the heat transfer fluid in the reflow chamber. The stage may be in the reflow chamber to support the substrate. The stage may be inclined to a bottom surface of the reflow chamber to induce the heat transfer fluid toward a central portion of the substrate. Thus, the vertically ascended heat transfer fluid may be uniformly applied to the central portion and an edge portion of the substrate so that the solders at the central portion and the edge portion of the substrate may be uniformly soldered.

Abstract: A chip bonding apparatus includes a stage configured to support a plurality of substrates, a bonding head located to face an upper surface of the stage in a vertical direction and configured to hold a plurality of semiconductor chips and transmit a laser beam, and a laser irradiating unit configured to irradiate a laser beam toward the semiconductor chips, wherein a plurality of trenches are formed in a lower surface of the bonding head.

Abstract: A method of manufacturing a semiconductor package include providing a substrate on a support plate. A semiconductor chip is placed on the substrate by a pick-up tool. An alternating current voltage is supplied to an induction coil positioned adjacent to the semiconductor chip. The pick-up tool includes an insulating material.

Abstract: Provided is a semiconductor package including a substrate defining a first recess portion and a plurality of second recess portions, the plurality of second recess portions are arranged on a bottom surface of the first recess portion, a semiconductor chip in the first recess portion of the substrate, solder balls arranged in the plurality of second recess portions of the substrate and electrically connected to the semiconductor chip, and a heat dissipation structure on the substrate and the semiconductor chip, the bottom surface of the first recess portion of the substrate being on a higher level than upper surfaces of the solder balls.

Abstract: A semiconductor package includes a substrate including an insulating layer and a plurality of first pads on the insulating layer; a semiconductor chip including a plurality of second pads electrically connected to at least a portion of the plurality of first pads, the plurality of second pads overlapping the at least a portion of the plurality of first pads in a first direction; and a plurality of bumps on one surface of the substrate or one surface of the semiconductor chip, each of which has at least a portion having a melting point lower than a melting point of each of the plurality of first pads and a melting point of each of the plurality of second pads, wherein the plurality of bumps include a plurality of first bumps electrically connected to at least a portion of the plurality of first pads or at least a portion of the plurality of second pads, and at least one second bump having a permeability higher than a permeability of each of the plurality of first bumps.

Abstract: Provided is a semiconductor package with enhanced reliability and a method of manufacturing the same. The semiconductor package includes a package substrate including a body layer having a central area and a peripheral area, a first protective layer on a top surface of the body layer, and a second protective layer on the first protective layer in the peripheral area, a semiconductor chip mounted on the first protective layer in the central area in a flip-chip structure, an underfill in a gap between the first protective layer and the semiconductor chip and in a gap between the connection terminals, an interposer on the semiconductor chip, and inter-substrate connection terminals on the peripheral area of the package substrate and electrically connecting the package substrate to the interposer, where the underfill has an anchor structure extending into the first protective layer.

Abstract: A solder reflow apparatus may include a reflow chamber, a heater and a stage. The reflow chamber may be configured to receive a heat transfer fluid. The heat transfer fluid may be configured for transferring heat to a solder for mounting an electronic part on a substrate. The heater may be configured to heat the heat transfer fluid in the reflow chamber. The stage may be in the reflow chamber to support the substrate. The stage may be inclined to a bottom surface of the reflow chamber to induce the heat transfer fluid toward a central portion of the substrate. Thus, the vertically ascended heat transfer fluid may be uniformly applied to the central portion and an edge portion of the substrate so that the solders at the central portion and the edge portion of the substrate may be uniformly soldered.

Abstract: A method of manufacturing an electronic device, includes: providing a substrate including a plurality of mounting regions on which electronic components are mounted respectively; forming a plurality of vapor passage holes that penetrate the substrate; disposing the electronic components on the substrate via bumps; heating a first heat transfer fluid to generate a second heat transfer fluid in a vapor state; supplying at least a portion of the second heat transfer fluid in the vapor state through the vapor passage holes of the substrate; and soldering the bumps using the at least the portion of the second heat transfer fluid in the vapor state.