Abstract: This silicon carbide semiconductor device includes: a substrate with a principal surface; a silicon carbide layer which is arranged on a side of the principal surface of the substrate and which includes a first impurity region of a first conductivity type; a trench which is arranged in the silicon carbide layer and which has a bottom located in the first impurity region; a trench bottom impurity layer which is arranged in the trench to contact with at least a portion of the bottom of the trench and which is a silicon carbide epitaxial layer of a second conductivity type; a gate insulating film which covers a side surface of the trench and the trench bottom impurity layer; and a gate electrode which is arranged over at least a portion of the gate insulating film that is located inside the trench.