Patents by Inventor Chain-Ting Huang

Chain-Ting Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for inspecting photo-mask
    Patent number: 8782569
    Abstract: An inspection method for a photo-mask in a semiconductor process is provided. First, a first photo-mask with a first wafer anchor point (1st wafer FAM) is provided. Then, Dmax and Dmin are calculated according to the 1st wafer FAM. A second photo-mask and a second mask anchor point (2nd mask FAM) of the second photo-mask are provided. A CD average, and a CD range of the second photo-mask are measured. Finally, the second photo-mask is inspected by using equation A and/or equation B: CD average?2nd mask FAM<Dmax?CD range/2??(equation A) 2nd mask FAM?CD average<Dmin?CD range/2??(equation B).
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: July 15, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chain-Ting Huang, Yung-Feng Cheng, Ming-Jui Chen