Abstract: An AI-driven cable mapping system that employs distributed fiber optic sensing (DFOS) fiber sensing and machine learning that provides autonomous determination of fiber optic cable location and mapping of same. Designed Al algorithms operating within our inventive systems and methods provide an easy solution for cable mapping in a GIS system; automatically maps using landmarks and manhole locations; and employs a supervised learning algorithm. A vehicle-assist operation is employed wherein a vehicle carries a Global Positioning System (GPS) device and drives along a roadway thereby following the fiber optic cable route; data paring that provides further significant locational information wherein time synchronizes between the DFOS system and vehicle GPS device from which we automatically pair the data of fiber length from traffic trajectories and GPS coordinates by time series.

Abstract: A structure deterioration detection system includes an optical fiber cable that is placed along the longitudinal direction of a structure and continuously detects any vibration along the longitudinal direction of the structure, and a signal processing unit including a vibration measurement unit that measures the strength of a detected vibration, a per unit time integration unit that integrates the vibration strength for a specified period of time, an information storage unit that stores the integrated vibration strength, and a deterioration determination unit that makes a determination about whether deterioration of the structure has occurred by comparing the integrated vibration strengths at different times.

Abstract: Embodiments of the present disclosure generally relate to a process chamber for conformal oxidation of high aspect ratio structures. The process chamber includes a liner assembly located in a first side of a chamber body and two pumping ports located in a substrate support portion adjacent a second side of the chamber body opposite the first side. The liner assembly includes a flow divider to direct fluid flow away from a center of a substrate disposed in a processing region of the process chamber. The liner assembly may be fabricated from quartz minimize interaction with process gases, such as radicals. The liner assembly is designed to reduce flow constriction of the radicals, leading to increased radical concentration and flux. The two pumping ports can be individually controlled to tune the flow of the radicals through the processing region of the process chamber.

Abstract: Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.

Abstract: Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.

Abstract: A traffic monitoring apparatus includes: at least one memory storing instructions; and at least one processor. The processor is configured to execute the instructions to; acquire waterfall data from a distributed acoustic sensor (DAS), wherein the waterfall data includes a generation position of a vibration on a roadway adjacent to the DAS, a generation time of the vibration and an amplitude of the vibration; preprocess the waterfall data; estimate at least one enhancement of the processed waterfall data, wherein an enhancement corresponds to a traffic flow property; and estimate at least one traffic flow property of the roadway from the enhancements of the processed waterfall data.

Abstract: The present disclosure provides a traffic prediction apparatus, system, method and program capable of predicting the number of vehicles and the speed of vehicles in a predetermined time and in a predetermined range based on waterfall data of vehicles. The traffic prediction apparatus comprises acquisition means for acquiring waterfall data comprising a generation position of a vibration, a generation time of the vibration and an amplitude of the vibration generated by a vehicle traveling on a road, pre-processing means for transforming the acquired waterfall data, generation means for training a portion of the plurality of processed waterfall data and at least one corresponding ground truth traffic property used as plurality of labels to generate a trained model, wherein the ground truth may be obtained from a secondary acquisition means, and prediction means for predicting at least one traffic property for a processed waterfall data.

Abstract: According to one example embodiment, an optical fiber sensor includes an optical fiber cable and a device body configured to cause an optical pulse signal to be incident on the optical fiber cable and identify, from intensity change of backscattered light of the incident optical pulse signal and an arrival time of the backscattered light, a prescribed environmental change having occurred in a vicinity of the optical fiber cable and an occurrence location of the environmental change, in which the device body performs correction of a sensing location on the optical fiber cable, based on environmental change information including the identified occurrence location and installation location information of the optical fiber cable.

Abstract: Embodiments of the present disclosure generally relate to apparatus for substrate processing, and more specifically to apparatus for rotating substrates and to uses thereof. In an embodiment, an apparatus for rotating a substrate is provided. The apparatus includes a levitatable rotor comprising a plurality of magnets embedded therein, a plurality of gas bearings positioned to levitate the levitatable rotor, and a stator magnetically coupled to the levitatable rotor, the stator for producing a rotating magnetic field. Apparatus for processing a substrate with the apparatus for rotating substrates as well as methods of use are also described.

Abstract: Provided are a structure deterioration detection system and a structure deterioration detection method capable of detecting deterioration of a structure at low cost. In one example embodiment, a structure deterioration detection system includes an optical fiber cable that is placed along the longitudinal direction of a structure and continuously detects any vibration along the longitudinal direction of the structure, and a signal processing unit including a vibration measurement unit that measures the strength of a detected vibration, a per unit time integration unit that integrates the vibration strength for a specified period of time, an information storage unit that stores the integrated vibration strength, and a deterioration determination unit that makes a determination about whether deterioration of the structure has occurred by comparing the integrated vibration strengths at different times.

Abstract: A traffic monitoring apparatus includes a distributed acoustic sensor (DAS) for acquiring waterfall data, wherein the waterfall data includes a generation position of a vibration on a roadway adjacent to the DAS, a generation time of the vibration and an amplitude of the vibration. The traffic monitoring apparatus further includes a processor connected to the DAS. The processor is configured to receive the waterfall data from the DAS. The processor is further configured to preprocess the waterfall data. The processor is further configured to separate the preprocessed waterfall data into a plurality of patches, wherein a size of each patch of the plurality of patches is determined based on a parameter of the roadway. The processor is further configured to process each of the plurality of patches to estimate at least one traffic flow property of the roadway.

Abstract: A purpose of the present disclosure is to provide a source separation method, a non-transitory computer readable medium, and a source separation apparatus. The source separation apparatus includes an input means for inputting mixture data obtained by mixing a plurality of data; and a matrix decomposition means for separating the input mixture data by estimating a mixing/unmixing matrix, a basis matrix for each source, an activations matrix for each source and a reliability vector for each source, and a means for unmixing of input mixture data using the estimated matrices from the matrix decomposition means to estimate the sources.

Abstract: A substrate support pedestal connectable to a shaft includes a thermally conductive body, a first fluid channel disposed within an outer zone of the thermally conductive body, and a second fluid channel disposed within an inner zone of the thermally conductive body. The first fluid channel and the second fluid channel are not in fluid communication with each other and are thermally isolated from each other by a thermal barrier within the substrate support channel.

Abstract: A traffic monitoring apparatus includes a distributed acoustic sensor (DAS) for acquiring waterfall data, wherein the waterfall data includes a generation position of a vibration on a roadway adjacent to the DAS, a generation time of the vibration and an amplitude of the vibration. The traffic monitoring apparatus further includes a processor connected to the DAS. The processor is configured to receive the waterfall data from the DAS. The processor is further configured to preprocess the waterfall data. The processor is further configured to separate the preprocessed waterfall data into a plurality of patches, wherein a size of each patch of the plurality of patches is determined based on a parameter of the roadway. The processor is further configured to process each of the plurality of patches to estimate at least one traffic flow property of the roadway.

Abstract: Embodiments described herein generally relate to a processing apparatus having a cover piece that participates in preheating a process gas. In one implementation, the cover piece includes an annulus. The annulus has an inner wall with a first height, an outer wall with a second height, and a top surface. The second height is greater than the first height. The cover piece also includes an inner lip disposed adjacent the inner wall, and a plurality of fins disposed on the top surface of the annulus. The cover piece and the plurality of fins are an opaque quartz material. The cover piece provides for more efficient heating of process gases, is composed of a material capable of withstanding process conditions while providing for more efficient and uniform processing, and has a low CTE reducing particle contamination due to excessive expansion during processing.

Abstract: Embodiments described herein relate to a showerhead having a reflector plate with a gas injection insert for radially distributing gas. In one embodiment, a showerhead assembly includes a reflector plate and a gas injection insert. The reflector plate includes at least one gas injection port. The gas injection insert is disposed in the reflector plate, and includes a plurality of apertures. The gas injection insert also includes a baffle plate disposed in the gas injection insert, wherein the baffle plate also includes a plurality of apertures. A first plenum is formed between a first portion of the baffle plate and the reflector plate, and a second plenum is formed between a second portion of the baffle plate and the reflector plate. The plurality of apertures of the gas injection insert and the plurality of apertures of the baffle plate are not axially aligned.

Abstract: Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.

Abstract: Embodiments described herein relate to a showerhead having a reflector plate with a gas injection insert for radially distributing gas. In one embodiment, a showerhead assembly includes a reflector plate and a gas injection insert. The reflector plate includes at least one gas injection port. The gas injection insert is disposed in the reflector plate, and includes a plurality of apertures. The gas injection insert also includes a baffle plate disposed in the gas injection insert, wherein the baffle plate also includes a plurality of apertures. A first plenum is formed between a first portion of the baffle plate and the reflector plate, and a second plenum is formed between a second portion of the baffle plate and the reflector plate. The plurality of apertures of the gas injection insert and the plurality of apertures of the baffle plate are not axially aligned.

Abstract: Embodiments described herein relate to a showerhead having a reflector plate with a gas injection insert for radially distributing gas. In one embodiment, a showerhead assembly includes a reflector plate and a gas injection insert. The reflector plate includes at least one gas injection port. The gas injection insert is disposed in the reflector plate, and includes a plurality of apertures. The gas injection insert also includes a baffle plate disposed in the gas injection insert, wherein the baffle plate also includes a plurality of apertures. A first plenum is formed between a first portion of the baffle plate and the reflector plate, and a second plenum is formed between a second portion of the baffle plate and the reflector plate. The plurality of apertures of the gas injection insert and the plurality of apertures of the baffle plate are not axially aligned.

Abstract: Embodiments of the present disclosure generally relate to a process chamber for conformal oxidation of high aspect ratio structures. The process chamber includes a liner assembly located in a first side of a chamber body and two pumping ports located in a substrate support portion adjacent a second side of the chamber body opposite the first side. The liner assembly includes a flow divider to direct fluid flow away from a center of a substrate disposed in a processing region of the process chamber. The liner assembly may be fabricated from quartz minimize interaction with process gases, such as radicals. The liner assembly is designed to reduce flow constriction of the radicals, leading to increased radical concentration and flux. The two pumping ports can be individually controlled to tune the flow of the radicals through the processing region of the process chamber.