Abstract: Provided are an apparatus for processing a substrate and a method for measuring a temperature of the substrate. The apparatus for processing the substrate includes a temperature measurement part and a light-transmitting shield plate. The temperature measurement part includes a light source, a light receiving part configured to receive reflected light reflected by the substrate or the shield plate among the light irradiated from the light source, and a radiant light emitted from the substrate to measure a quantity of the reflected light and an intensity of the radiant light and a temperature calculation part configured to calculate the temperature of the substrate, to which a contamination level of the shield plate is reflected, by using the quantity of the reflected light and the intensity of the radiant light.

Abstract: Provided are an apparatus for processing a substrate and a method for measuring a temperature of the substrate. The apparatus for processing the substrate includes a temperature measurement part and a light-transmitting shield plate. The temperature measurement part includes a light source, a light receiving part configured to receive reflected light reflected by the substrate or the shield plate among the light irradiated from the light source, and a radiant light emitted from the substrate to measure a quantity of the reflected light and an intensity of the radiant light and a temperature calculation part configured to calculate the temperature of the substrate, to which a contamination level of the shield plate is reflected, by using the quantity of the reflected light and the intensity of the radiant light.

Abstract: The present invention relates to a hinge apparatus for a door, and more particularly, to a separated type hinge apparatus with an automatic return function, in which a restoring device and a damping device are installed separately so that the overall length of the hinge apparatus is reduced, and thus the hinge apparatus may be buried less deeply. A separated type hinge apparatus comprises: an elastic casing; a first elastic member that provides a restoring force; a clutch device which is combined with one end of the first elastic member and controls the elastic force of the first elastic member to remain constant; a shaft penetratively combined through the clutch device in order to transmit a rotational force; and a spring fixing member which is coupled to the other end of the first elastic member and has a gear groove to control a spring elastic force.

Abstract: A hinge apparatus includes an upper body, a lower body, a shaft whose lower end portion is rotatably installed in the lower body, a piston whose outer circumference is slidably installed along the inner surface of the lower body, a rotational/linear motion converter which converts a rotational motion of the shaft into an axial linear motion of the piston, a damping unit provides a damping function selectively where the piston ascends according to return of the door, a torsion spring rotates the shaft in the door closing direction, and a clutch unit for stopping the elastic force due to reverse twisting of the spring or for restoring the elastic force of the spring.

Abstract: The present invention relates to a hinge apparatus for a door, and more particularly, to a separated type hinge apparatus with an automatic return function, in which a restoring device and a damping device are installed separately so that the overall length of the hinge apparatus is reduced, and thus the hinge apparatus may be buried less deeply. A separated type hinge apparatus comprises: an elastic casing; a first elastic member that provides a restoring force; a clutch device which is combined with one end of the first elastic member and controls the elastic force of the first elastic member to remain constant; a shaft penetratively combined through the clutch device in order to transmit a rotational force; and a spring fixing member which is coupled to the other end end of the first elastic member and has a gear groove to control a spring elastic force.

Abstract: A hinge apparatus having an automatic return function for building materials is provided, in which a return spring is removed to thereby offer a closing force of each door with only a torsion spring. The hinge apparatus includes an upper body; a lower body; a shaft whose lower end portion is rotatably installed in the lower body; a piston whose outer circumference is slidably installed along the inner surface of the lower body”, a rotational/linear motion converter which converts a rotational motion of the shaft into an axial linear motion of the piston according to rotation of the door; a damping unit which provides a damping function selectively where the piston ascends according to return of the door; a torsion spring which rotates the shaft in the direction returning the door at the closing time; and a clutch unit for stopping an increment of an elastic force due to reverse twisting of the spring where an opening angle reaches a clutch stop start angle, or for restoring the elastic force of the spring.