Patents by Inventor Chan-Ho Ryu

Chan-Ho Ryu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for inspecting defects on polishing pads to be used with chemical mechanical polishing apparatus
    Patent number: 7027640
    Abstract: The present invention provides an apparatus and method for detecting or inspecting defects on a polishing pad for use in performing chemical mechanical polishing of a wafer. The apparatus for detecting the defects on the pad comprises a pad driving device for loading the pad thereon and moving the pad, at least one camera installed to face the pad for converting an image of the pad into an electrical signal and outputting the converted electrical signal, a digital image data acquisition device for converting the electrical signal transmitted from the camera into a digital signal, and an image data processing unit for processing the image data and detecting the defects on the pad.
    Type: Grant
    Filed: August 23, 2002
    Date of Patent: April 11, 2006
    Assignee: Nanometrics Incorporated
    Inventors: Sung-Jin Park, Chan-Ho Ryu
  • Method and apparatus for inspecting defects on polishing pads to be used with chemical mechanical polishing apparatus
    Publication number: 20030039387
    Abstract: The present invention provides an apparatus and method for detecting or inspecting defects on a polishing pad for use in performing chemical mechanical polishing of a wafer. The apparatus for detecting the defects on the pad comprises a pad driving device for loading the pad thereon and moving the pad, at least one camera installed to face the pad for converting an image of the pad into an electrical signal and outputting the converted electrical signal, a digital image data acquisition device for converting the electrical signal transmitted from the camera into a digital signal, and an image data processing unit for processing the image data and detecting the defects on the pad.
    Type: Application
    Filed: August 23, 2002
    Publication date: February 27, 2003
    Applicant: Nanometrics Incorporated
    Inventors: Sung-Jin Park, Chan-Ho Ryu