Patents by Inventor CHAN SOO KANG

CHAN SOO KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10901007
    Abstract: An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: January 26, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young Do Kim, Sung Yong Lim, Chan Soo Kang, Do Hoon Kwon, Min Ju Kim, Sang Ki Nam, Jung Mo Yang, Jong Hun Pi, Kyu Hee Han
  • Publication number: 20200072874
    Abstract: An RF sensing apparatus configured for use with a plasma processing chamber includes a penetration unit opened in an up/down direction, a main return path unit surrounding all or a portion of the penetration unit, and a secondary return path unit located between the penetration unit and the main return path unit, spaced apart from the main return path unit, and surrounding all or a portion of the penetration unit. The main return path unit and the secondary return path unit include a path through which a current flows in one of the up/down directions.
    Type: Application
    Filed: January 29, 2019
    Publication date: March 5, 2020
    Inventors: YOUNG DO KIM, SUNG YONG LIM, CHAN SOO KANG, DO HOON KWON, MIN JU KIM, SANG KI NAM, JUNG MO YANG, JONG HUN PI, KYU HEE HAN