Patents by Inventor Chan Yong AN

Chan Yong AN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    Publication number: 20230215693
    Abstract: The inventive concept provides a substrate processing apparatus. The substrate processing apparatus may include a chamber having an interior space, a support unit that supports a substrate in the interior space, a ring unit disposed on an edge region of the support unit when viewed from above, an impedance control unit electrically connected to the ring unit to control a flow or density of plasma in an edge region of the substrate and a filter unit disposed between the ring unit and the impedance control unit.
    Type: Application
    Filed: December 28, 2022
    Publication date: July 6, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Chan Yong AN, Ja Myung Gu, Sang Moon Yoo, Tae Hoon Jo