Abstract: A semiconductor memory device includes: a substrate including a cell area, a peripheral area, and a boundary area; a storage pad connected to an active area in the cell area; a capacitor including a lower electrode, a first electrode support layer supporting the lower electrode, a capacitor dielectric, and an upper electrode; a peripheral gate on the peripheral area of the substrate; first peripheral contact plugs on both sides of the peripheral gate and connected to the substrate; a first interlayer insulating layer on the storage pad and the first peripheral contact plugs; a second interlayer insulating layer on the first interlayer insulating layer; and a first insulating layer on the second interlayer insulating layer, wherein the first insulating layer extends on the boundary area of the substrate, and a height of the first insulating layer is equal to or less than a height of the first electrode support layer.

Abstract: Provided are a container transporting apparatus for storing items such as FOUPs and reticle pods by utilizing the dead zone space located in an upper portion of the semiconductor manufacturing facility built in the FAB, and a container storage system having the same. The container storage system may include a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container; a second storage unit installed on a side of the first storage unit and for storing the container; and a transporting unit moving between the first storage unit and the second storage unit and for transporting the container stored in the first storage unit to the second storage unit.

Abstract: Provided are a container transporting apparatus for storing items such as FOUPs and reticle pods by utilizing the dead zone space located in an upper portion of the semiconductor manufacturing facility built in the FAB, and a container storage system having the same. The container storage system may include a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container; a second storage unit installed on a side of the first storage unit and for storing the container; and a transporting unit moving between the first storage unit and the second storage unit and for transporting the container stored in the first storage unit to the second storage unit.

Abstract: A local exhaust system includes a motor provided in an exhaust pipe to generate a rotary drive force when power is applied thereto, in which air is taken in through an intake port and exhausted through the exhaust pipe, a rotor structure disposed on the leading end of the intake port and connected to a drive shaft of the motor, the rotor structure rotating about a central portion of the exhaust pipe, and a plurality of turbulence-generating outer blades for generating a turbulent flow when rotated. Each of the turbulence-generating outer blades is assembled to the outer surface of the rotor structure via an angle-adjusting member in such a fashion that the angle of the turbulence-generating outer blade is adjustable with respect to the direction in which air is taken in through the intake port.