Patents by Inventor Chandrashekar KENCHAPPA

Chandrashekar KENCHAPPA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for improved anode-cathode ratio for rf chambers
    Patent number: 11492697
    Abstract: Embodiments of process kits for use in plasma process chambers are provided herein. In some embodiments, a process kit for use in a process chamber includes an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the annular body includes an inner surface having a first segment that extends downward, a second segment that extends radially outward from the first segment, a third segment that extends downward from the second segment, a fourth segment that extends radially outward from the third segment, a fifth segment that extends downward from the fourth segment, a sixth segment that extends radially inward from the fifth segment, a seventh segment that extends downward from the sixth segment, and an eighth segment that extends radially inward from the seventh segment.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: November 8, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kirankumar Neelasandra Savandaiah, Keith A. Miller, Srinivasa Rao Yedla, Chandrashekar Kenchappa, Martin Lee Riker
  • APPARATUS FOR IMPROVED ANODE-CATHODE RATIO FOR RF CHAMBERS
    Publication number: 20210395877
    Abstract: Embodiments of process kits for use in plasma process chambers are provided herein. In some embodiments, a process kit for use in a process chamber includes an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the annular body includes an inner surface having a first segment that extends downward, a second segment that extends radially outward from the first segment, a third segment that extends downward from the second segment, a fourth segment that extends radially outward from the third segment, a fifth segment that extends downward from the fourth segment, a sixth segment that extends radially inward from the fifth segment, a seventh segment that extends downward from the sixth segment, and an eighth segment that extends radially inward from the seventh segment.
    Type: Application
    Filed: June 22, 2020
    Publication date: December 23, 2021
    Inventors: Kirankumar Neelasandra SAVANDAIAH, Keith A. MILLER, Srinivasa Rao YEDLA, Chandrashekar KENCHAPPA, Martin Lee RIKER