Patents by Inventor Chandrashekaran Gurumurthy

Chandrashekaran Gurumurthy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for rendering SEM images and predicting defect imaging conditions of substrates using 3D design
    Patent number: 11880193
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive training images of one or more features of a specimen from the characterization sub-system; receive training three-dimensional (3D) design images corresponding to the one or more features of the specimen; generate a deep learning predictive model based on the training images and the training 3D design images; receive product 3D design images of one or more features of a specimen; generate simulated images of the one or more features of the specimen based on the product 3D design images with the deep learning predictive model; and determine one or more characteristics of the specimen based on the one or more simulated images.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: January 23, 2024
    Assignee: KLA Corporation
    Inventors: Arpit Yati, Chandrashekaran Gurumurthy
  • System and Method for Rendering SEM Images and Predicting Defect Imaging Conditions of Substrates Using 3D Design
    Publication number: 20210026338
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive training images of one or more features of a specimen from the characterization sub-system; receive training three-dimensional (3D) design images corresponding to the one or more features of the specimen; generate a deep learning predictive model based on the training images and the training 3D design images; receive product 3D design images of one or more features of a specimen; generate simulated images of the one or more features of the specimen based on the product 3D design images with the deep learning predictive model; and determine one or more characteristics of the specimen based on the one or more simulated images.
    Type: Application
    Filed: September 9, 2019
    Publication date: January 28, 2021
    Inventors: Arpit Yati, Chandrashekaran Gurumurthy