Patents by Inventor Chang-Gee Hong

Chang-Gee Hong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a dielectric layer
    Patent number: 5656337
    Abstract: A deposition rate of a dielectric material is varied with the electrical polarity of an underlying layer to obtain excellent deposition and planarization characteristics. A conductive layer and the underlying dielectric are surface-treated to have different electrical polarities so that the dielectric is formed by using the difference of deposition rates of the dielectric material between that on the conductive layer and that on the underlying dielectric. A CVD apparatus having a DC power source connected between a susceptor and a gas injection portion thereof is provided. The deposition and planarization can be performed at low temperatures and are simplified in process.
    Type: Grant
    Filed: August 31, 1994
    Date of Patent: August 12, 1997
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: In-Seon Park, Myoung-Bum Lee, Chang-Gee Hong, Chang-Gyu Kim, U-In Chung
  • Apparatus for forming a dielectric layer
    Patent number: 5560778
    Abstract: A deposition rate of a dielectric material is varied with the electrical polarity of an underlying layer to obtain excellent deposition and planarization characteristics. A conductive layer and the underlying dielectric are surface-treated to have different electrical polarities so that the dielectric is formed by using the difference of deposition rates of the dielectric material between that on the conductive layer and that on the underlying dielectric. A CVD apparatus having a DC power source connected between a susceptor and a gas injection portion thereof is provided. The deposition and planarization can be performed at low temperatures and are simplified in process.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: October 1, 1996
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: In-Seon Park, Myoung-Bum Lee, Chang-Gee Hong, Chang-Gyu Kim, U-In Chung