Abstract: Disclosed is an artificial intelligence apparatus for detecting a target gas, which includes a mixed gas measurement unit that measures a mixed gas collected in a plurality of domains through a sensor array to generate sensing data including heterogeneous domain measurement data measured from the mixed gas collected in a domain different from the target gas and target domain measurement data measured from the mixed gas collected from the same domain as the target gas, a heterogeneous intelligence model deep learning unit that receives the heterogeneous domain measurement data to train a heterogeneous intelligence model, a target intelligence model deep learning unit that receives the heterogeneous intelligence model and the target domain measurement data to train a target intelligence model, and a target gas detection unit that determines whether an environmental gas includes the target gas using the target intelligence model.

Abstract: Provided is a MOSFET with an ultra short channel length and a method of fabricating the same. The ultra short channel MOSFET has a silicon wire channel region with a three-dimensional structure, and a source/drain junction formed in a silicon conductive layer formed of both sides of the silicon wire channel region. Also, a gate electrode formed on the upper surface of the silicon wire channel region by interposing a gate insulating layer having a high dielectric constant therebetween, and source and drain electrodes connected to the source/drain junction are included. The silicon wire channel region is formed with a triangular or trapezoidal section by taking advantage of different etch rates that depend on the planar orientation of the silicon. The source/drain junction is formed by a solid-state diffusion method.