Abstract: A method includes providing a process chamber including a target, wherein the target has a first coefficient of thermal expansion (CTE); selecting a process kit including a surface layer having a second CTE close to the first CTE; and installing the process kit in the process chamber with the surface layer exposed to the process chamber. A ratio of a difference between the first CTE and the second CTE is less than about 35 percent.

Abstract: A method and system for determining a lifetime of a target for a physical vapor deposition tool (302), has, a mapping table (304a) of criteria for a minimum accumulating rate of ? wafers fabricated by ? target life for a target in the tool; and a database (304) recording ? wafers fabricated by ? target life for a target in the tool; and a computer (306) retrieving the criteria from the mapping table and entering the criteria in the database; and the tool (302) reporting ? wafers fabricated by ? target life for a target in the tool (302) for comparison with the criteria.

Abstract: A system and method for detecting a malfunction of a slave power supply and triggering an interlock signal in response to the detection of the malfunction. The method for activating an interlock signal on detecting a malfunction of a slave power supply, includes receiving first and second inputs. In one embodiment, the first input received represents status of a set point, and the second input represents output power. On receiving the inputs the method determines that the slave power supply system has malfunctioned when the received inputs substantially mismatch. In response to the determination of the malfunction, an interlock signal is activated. In one embodiment, the system to implement the method includes a processing unit, memory coupled to the processing unit and a program included in the memory, where the program is executable to implement the method.

Abstract: A system and method for detecting a malfunction of a slave power supply and triggering an interlock signal in response to the detection of the malfunction. The method for activating an interlock signal on detecting a malfunction of a slave power supply, includes receiving first and second inputs. In one embodiment, the first input received represents status of a set point, and the second input represents output power. On receiving the inputs the method determines that the slave power supply system has malfunctioned when the received inputs substantially mismatch. In response to the determination of the malfunction, an interlock signal is activated. The system to implement the method includes a first circuit section and a second circuit section. The first circuit section is configurable to receive a first signal representing status of the set point for the output power and a second signal representing the output power of the power supply system.