Abstract: An electromagnetic scanning micro-mirror is provided with a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to connect the mirror plate to the substrate, and a magnetic substance provided at the rear surface of the reflective plane of the mirror plate and adapted to generate a drive force by interacting with the magnetic field supplied from the magnetic field generator, wherein the mirror plate performs a rotation operation about the torsion bars, which define the rotating axis of the mirror plate, by use of the drive force generated from the magnetic substance.

Abstract: The present invention relates to a variably focusing mirror for realizing an automatic focusing and optical zooming of a miniature camera module, the mirror comprising a driving part having a supporting board and more than one permanent magnet attached on the supporting board; and a mirror having a coil, a reflective surface of which a curvature is changed by the magnitude and the direction of a current flowing through the coil and a thin film on which the reflective surface is incorporated. The variably focusing mirror according to the present invention can realize a focusing and an optical zooming by adjusting a curvature radius of a reflective surface. Therefore, it can remarkably decrease the volume of a camera module and be used in various applications requiring for a miniature camera module.

Abstract: The present invention relates to a small form factor camera module, more particularly, to a small form factor camera module having a mechanical iris and a shutter not only to improve an image quality by adjusting an amount of a light entering an image sensor but also to remarkably reduce a volume of the entire system by using an electromagnetic force and therefore to be applied to various applications which require for a small form factor camera module including a handheld terminal and so on, contrary to the existing electronic shutter.

Abstract: Disclosed is a device for reducing deterioration of image quality which can get rid of speckle by equalizing a laser from a light source on a screen by vibrating a reflective mirror installed between the light source and the screen at a predetermined amplitude. The device for reducing deterioration of image quality in a display system using a laser as a light source includes: a reflective mirror formed at the path of light positioned between the light source and a screen, for reflecting the laser; and a driving unit connected to the reflective mirror and vibrating the reflective mirror at a predetermined amplitude by using an electromagnetic force.

Abstract: Disclosed herein are a surface acoustic wave linear motor that can be driven in opposite directions along a predetermined path, a package including the surface acoustic wave linear motor, and a lens actuator that is capable of performing an optical zoom function by adopting the surface acoustic wave linear motor package. The surface acoustic wave linear motor includes a substrate, through which a surface acoustic wave progresses, a movable part constructed such that the movable part can perform a translating movement in the opposite direction to the progressing direction of the surface acoustic wave, and electrodes for supplying the substrate with power to generate the surface acoustic wave in the substrate. According to the present invention, the surface acoustic wave linear motor is capable of performing a translating movement without the provision of an additional mechanism, unlike the conventional actuator using the rotary motor, the gear, and the lead screw.

Abstract: A varifocal mirror and a camera module comprising the same are disclosed. The varifocal mirror comprises a substrate, a thin film having a circumference supported by the substrate and a variable radius of curvature, and a reflective plane attached to the thin film to reflect light. The reflective plane has a radius of curvature varying in response to variation in the radius of curvature of the thin film. The camera module embodies focus and optical zoom functions via actuation of the varifocal mirror instead of using an electromagnetic actuator, a step motor and the like when adjusting positions of lens units, significantly reducing a volume of the overall system. With this structure, the camera module can be applied to various portable digital assistances requiring a minimized camera module, such as PDAs, mobile phones and the like.

Abstract: Disclosed herein is an electromagnetic scanning micro-mirror for use in an optical scanning device. The electromagnetic micro-mirror, which is designed to reflect an input light beam using an electromagnetic force, is able to perform a rotating operation, to achieve a modulation in a path of a reflected light beam. The electromagnetic scanning micro-mirror comprise a magnetic field generator for supplying a magnetic field, a mirror plate having a reflective plane and a frame structure attached to a rear surface of the reflective plane, a substrate to surround the mirror plate, a pair of torsion bars to connect the mirror plate to the substrate, and a magnetic substance provided at the rear surface of the reflective plane of the mirror plate and adapted to generate a drive force by interacting with the magnetic field supplied from the magnetic field generator.

Abstract: A micro actuator for controlling a focal depth includes: a lens for forming a focal point by focusing light coming from a light source; a lens mounting unit having a lens mounted therein and allowing the lens to move in one axial direction; and an electromagnetic force generator consisting of a constant magnetic field generating member having a magnetic field in a predetermined direction and a variable magnetic field generating member for changing direction and strength of a magnetic field according to direction and amount of a current, installed at and around the lens mounting unit and causing the lens to move in a direction of an electromagnetic force generated by interaction of the two magnetic field generating members. The micro actuator for controlling a focal depth can be fabricated in a ultra-compact size, available for a mass production, and has a fast response speed.

Abstract: Disclosed herein are a scanning micro-mirror package for use in optical scanning devices in which micro-mirrors reflect incident beams and modulate the optical path of the reflected beams in response to input signals and a method for fabricating the same. The scanning micro-mirror package comprises a suitable lid having therein a transparent window through which light beams pass and a housing combined with the lid, wherein a micro-mirror is protected from external impacts and conduct its own functions well. The scanning micro-mirror package is applicable to a device which displays or reads image information or data by scanning a light beam emergent from a light source over a predetermined range. Having such a structure, the scanning micro-mirror package allows the micro-mirror to optimally exhibit its optical and mechanical performance in addition to protecting the micro-mirror from external factors which adversely influence the performance.

Abstract: Disclosed are a micro-actuator, a fabrication method thereof, and a micro-actuating valve.

Abstract: Disclosed herein is a lens driving device which is able to increase displacement without restriction, does not require a complex structure despite having a low power consumption, solves problems of friction and noise occurring in a gear mechanism, and realizes miniaturization and lightness. The lens driving device of the present invention includes a substrate which generates surface acoustic waves on a surface thereof, and a movable unit which is coupled to an optical lens and executes translation above the substrate using the surface acoustic waves. Therefore, the lens driving device of the present invention can implement translation of a lens without a separate mechanism, unlike conventional driving devices using motors and screws. Furthermore, the present invention satisfies the recent trend towards miniaturization and lightness, thus being usable in a variety of industrial fields that use optical lenses.

Abstract: A flow control valve apparatus using a flow control valve manufactured via micro-machining is provided. The flow control valve has a substrate defining at least one orifice through which a fluid can flow, a support member formed on a first surface of the substrate, at least one flap corresponding to the at least one orifice, a pair of elastic flexures connecting the support member to the at least one flap, and a driving means for displacing the at least one flap between the first and second positions to control fluid flow through the at least one orifice. The support member is formed adjacent to the at least one orifice and the at least one flap extends from the support member to fittingly engage the at least one orifice in a first and second position. Also, the pair of elastic flexures provides an elastic restorative force proportional to a displacement of the at least one flap between the first and second positions.

Abstract: Disclosed herein is a raster scanning display system. The raster scanning display system includes a micro mirror and a galvanic mirror. The micro mirror rotates in two horizontal directions and forms a horizontal beam by reflecting input light. The galvanic mirror rotates in two vertical directions and forms a two-dimensional scan region by reflecting the horizontal beam.

Abstract: A scanning device includes a mirror unit formed on a substrate so as to be pivotable centering around one axis for adjusting the direction of reflected light; a support frame formed at one surface of the mirror unit for preventing dynamic deflection of the mirror unit and supporting the mirror unit; and a driving unit provided on the substrate and driving the mirror unit. Thus, a dynamic deflection phenomenon does not occur when the mirror unit is pivoted centering around the pivoting axis. Accordingly, stable operation is possible and the angle of rotation of the mirror unit can be accurately adjusted, so that the scanning device can be effectively used in a high-speed precision scanning system.

Abstract: Disclosed is a device for reducing deterioration of image quality which can get rid of speckle by equalizing a laser from a light source on a screen by vibrating a reflective mirror installed between the light source and the screen at a predetermined amplitude. The device for reducing deterioration of image quality in a display system using a laser as a light source includes: a reflective mirror formed at the path of light positioned between the light source and a screen, for reflecting the laser; and a driving unit connected to the reflective mirror and vibrating the reflective mirror at a predetermined amplitude by using an electromagnetic force.

Abstract: A micro actuator for controlling a focal depth includes: a lens for forming a focal pint by focusing light coming from a light source; a lens mounting unit having a lens mounted therein and allowing the lens to move in one axial direction; and an electromagnetic force generator consisting of a constant magnetic field generating member having a magnetic field in a predetermined direction and an variable magnetic field generating member for changing direction and strength of a magnetic field according to direction and amount of a current, installed at and around the lens mounting unit and causing the lens to move in a direction of an electromagnetic force generated by interaction of the two magnetic field generating members. The micro actuator for controlling a focal depth can be fabricated in a ultra-compact size, available for a mass production, and has a fast response speed.

Abstract: Disclosed are a micro-actuator, a fabrication method thereof, and a micro-actuating valve.

Abstract: A leak control valve preventing the damage of the vacuum pump and/or the neighboring instruments even in the case of fluid leak at the vessel. The side wall of the valve poppet closes the channel to the outlet through restoring forces of the springs installed at both sides of the poppet in case when the abrupt pressure change happens by accident.

Abstract: An optical receiver and an optical transmitter and a producing method thereof using a variable optical attenuator includes a base member formed in a predetermined shape; an input optical fiber emitting an optical signal toward the base member; an optical receiving means provided at one side of the base member, and receiving an optical signal; and a variable optical attenuator actuated by an electrostatic force, changing a path of laser emitted from the input optical fiber, and thus adjusting optical power made to be incident to the optical receiving means. Positions of the input optical fiber and the optical receiving means can be changed, and the variable optical attenuator can be produced by a MEMS technology so that the variable optical attenuator can be produced with a low unit price, actuated with small electric power, and can transmit an accurate optical signal.

Abstract: In an optical switch including an input block in which light is incident; an output block for transferring input light from the input block; and a reflector for performing a switching operation by reflecting input light from the input block, wherein the input block and the output block are arranged so as to make input light from the input block and reflected light reflected on the reflector and transferred to the output block have an acute angle less than 90 degrees, and accordingly an optical switch capable of simplifying an assembly process and a package process and reducing a size of an optical switch package can be provided.