Patents by Inventor Chang-Ju Yun

Chang-Ju Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Baking apparatus for manufacturing a semiconductor device
    Patent number: 6808391
    Abstract: A baking apparatus for manufacturing a semiconductor device remarkably enhances the uniformity of the CD (Critical Dimension) of a wafer by creating a uniform temperature distribution. The apparatus includes a processing having an open upper part, a hot plate disposed in the chamber and on which a wafer is to be mounted, a cover covering the upper part of the chamber; and a thin film made of material having a low emissivity extending over the inner surface of the cover. The inventive structure prevents the emission of heat to the outside so that the temperature within the processing chamber can be rapidly stabilized.
    Type: Grant
    Filed: September 5, 2003
    Date of Patent: October 26, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chang-Ju Yun
  • Baking apparatus for manufacturing a semiconductor device
    Publication number: 20040048219
    Abstract: A baking apparatus for manufacturing a semiconductor device remarkably enhances the uniformity of the CD (Critical Dimension) of a wafer by creating a uniform temperature distribution. The apparatus includes a processing having an open upper part, a hot plate disposed in the chamber and on which a wafer is to be mounted, a cover covering the upper part of the chamber; and a thin film made of material having a low emissivity extending over the inner surface of the cover. The inventive structure prevents the emission of heat to the outside so that the temperature within the processing chamber can be rapidly stabilized.
    Type: Application
    Filed: September 5, 2003
    Publication date: March 11, 2004
    Inventor: Chang-Ju Yun