Patents by Inventor Chang-Lin Yang
Chang-Lin Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12080768Abstract: A transistor includes a gate electrode, a gate dielectric layer covering the gate electrode, an active layer covering the gate dielectric layer and including a first metal oxide material, and source/drain electrodes disposed on the active layer and made of a second metal oxide material with an electron concentration of at least about 1018 cm?3. A semiconductor structure and a manufacturing method are also provided.Type: GrantFiled: August 19, 2021Date of Patent: September 3, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Yen Chuang, Chang-Lin Yang, Katherine H. Chiang, Mauricio Manfrini
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Patent number: 12057337Abstract: A chip transferring method includes providing a plurality of chips on a first load-bearing structure; measuring photoelectric characteristic values of the plurality of chips; categorizing the plurality of chips into a first portion chips and a second portion chips according to the photoelectric characteristic values of the plurality of chips, wherein the second portion chips comprise parts of the plurality of chips which photoelectric characteristic value falls within an unqualified range; removing the second portion chips from the first load-bearing structure; dividing the first portion chips into a plurality of blocks according to the photoelectric characteristic values, and each of the plurality of blocks comprising multiple chips of the first portion chips; and transferring the multiple chips of one of the plurality of blocks to a second load-bearing structure.Type: GrantFiled: May 4, 2023Date of Patent: August 6, 2024Assignee: EPISTAR CORPORATIONInventors: Min-Hsun Hsieh, De-Shan Kuo, Chang-Lin Lee, Jhih-Yong Yang
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Patent number: 12048250Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells by chemical reaction. The metal components are then removed by chemical reaction.Type: GrantFiled: April 15, 2021Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Lin Yang, Chung-Te Lin, Sheng-Yuan Chang, Han-Ting Lin, Chien-Hua Huang
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Patent number: 12010924Abstract: Semiconductor structures and methods for manufacturing the same are provided. The method includes forming a bottom electrode layer over a substrate and forming a pinned layer over the bottom electrode layer. The method also includes forming a tunnel barrier layer over the pinned layer and forming a free layer over the tunnel barrier layer. The method also includes patterning the free layer, the tunnel barrier layer, and the pinned layer to form a magnetic tunnel junction (MTJ) stack structure and patterning the bottom electrode layer to form a bottom electrode structure under the MTJ stack structure. In addition, patterning the free layer includes using a first etching gas, and patterning the bottom electrode layer includes using a second etching gas, which is different from the first etching gas.Type: GrantFiled: March 18, 2021Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Pin Chiu, Chang-Lin Yang, Chien-Hua Huang, Chen-Chiu Huang, Chih-Fan Huang, Dian-Hau Chen
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Publication number: 20240090336Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.Type: ApplicationFiled: November 17, 2023Publication date: March 14, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
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Patent number: 11849644Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.Type: GrantFiled: April 15, 2021Date of Patent: December 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Lin Yang, Chung-Te Lin, Sheng-Yuan Chang, Han-Ting Lin, Chien-Hua Huang
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Publication number: 20230263069Abstract: A method for manufacturing a memory device includes forming a first metal layer over a substrate, forming a magnetic tunnel junction (MTJ) layer stack over the first metal layer, forming a second metal layer over the MTJ layer stack, forming a hard mask layer over the second metal layer, performing a first etching process on the MTJ layer stack to form an MTJ structure and a redeposited layer on a sidewall of the MTJ structure, performing a second etching process to remove the redeposited layer, and performing a third etching process on the sidewall of the MTJ structure.Type: ApplicationFiled: February 15, 2022Publication date: August 17, 2023Inventors: Chang-Lin Yang, Sheng-Yuan Chang, Chung-Te Lin, Han-Ting Lin, Chien-Hua Huang
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Publication number: 20230058626Abstract: A transistor includes a gate electrode, a gate dielectric layer covering the gate electrode, an active layer covering the gate dielectric layer and including a first metal oxide material, and source/drain electrodes disposed on the active layer and made of a second metal oxide material with an electron concentration of at least about 1018 cm?3. A semiconductor structure and a manufacturing method are also provided.Type: ApplicationFiled: August 19, 2021Publication date: February 23, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Yen Chuang, Chang-Lin Yang, Katherine H. CHIANG, Mauricio MANFRINI
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Publication number: 20220336731Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells. The metal components are then removed by chemical reaction. However, the removal of the metal components may form extra substances on the substrate. A further etching process is then performed to remove the extra substances by physical etching.Type: ApplicationFiled: April 15, 2021Publication date: October 20, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
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Publication number: 20220336732Abstract: A method for fabricating magnetoresistive random-access memory cells (MRAM) on a substrate is provided. The substrate is formed with a magnetic tunneling junction (MTJ) layer thereon. When the MTJ layer is etched to form the MRAM cells, there may be metal components deposited on a surface of the MRAM cells and between the MRAM cells by chemical reaction. The metal components are then removed by chemical reaction.Type: ApplicationFiled: April 15, 2021Publication date: October 20, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chang-Lin YANG, Chung-Te LIN, Sheng-Yuan CHANG, Han-Ting LIN, Chien-Hua HUANG
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Publication number: 20220302375Abstract: Semiconductor structures and methods for manufacturing the same are provided. The method includes forming a bottom electrode layer over a substrate and forming a pinned layer over the bottom electrode layer. The method also includes forming a tunnel barrier layer over the pinned layer and forming a free layer over the tunnel barrier layer. The method also includes patterning the free layer, the tunnel barrier layer, and the pinned layer to form a magnetic tunnel junction (MTJ) stack structure and patterning the bottom electrode layer to form a bottom electrode structure under the MTJ stack structure. In addition, patterning the free layer includes using a first etching gas, and patterning the bottom electrode layer includes using a second etching gas, which is different from the first etching gas.Type: ApplicationFiled: March 18, 2021Publication date: September 22, 2022Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Pin CHIU, Chang-Lin YANG, Chien-Hua HUANG, Chen-Chiu HUANG, Chih-Fan HUANG, Dian-Hau CHEN
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Publication number: 20220020916Abstract: An integrated circuit includes a substrate, a dielectric layer over the substrate, a plurality of cells, a plurality of spacers and a plurality of conductive particles. Each of the cells includes a bottom portion in the dielectric layer and an upper portion protruding from the dielectric layer. The spacers are disposed over the dielectric layer and partially cover the upper portions of the cells, respectively. The spacers are disconnected from each other, and cover a first area of the dielectric layer and expose a second area of the dielectric layer. The conductive particles are disposed between the first area of the dielectric layer and the spacers.Type: ApplicationFiled: July 17, 2020Publication date: January 20, 2022Inventors: CHANG-LIN YANG, CHUNG-TE LIN, HAN-TING TSAI, CHIEN-HUA HUANG
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Patent number: 11211549Abstract: An integrated circuit includes a substrate, a dielectric layer over the substrate, a plurality of cells, a plurality of spacers and a plurality of conductive particles. Each of the cells includes a bottom portion in the dielectric layer and an upper portion protruding from the dielectric layer. The spacers are disposed over the dielectric layer and partially cover the upper portions of the cells, respectively. The spacers are disconnected from each other, and cover a first area of the dielectric layer and expose a second area of the dielectric layer. The conductive particles are disposed between the first area of the dielectric layer and the spacers.Type: GrantFiled: July 17, 2020Date of Patent: December 28, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chang-Lin Yang, Chung-Te Lin, Han-Ting Tsai, Chien-Hua Huang
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Patent number: 7761886Abstract: A disk device includes a frame defining a tray housing and a rail housing communicating with the tray housing; a tray releasably received in the tray housing in the frame; and a rail movably incorporated in the rail housing. The rail includes a slide for drawing the tray out of the frame, and a latching member for detachably engaging with the tray. The slide is movable along a first direction that exposes from the rail housing, the latching member is movable along a second direction substantially perpendicular to the first direction between a first position where the latching member is engaged with the tray and a second position where the latching member is disengaged with the tray.Type: GrantFiled: December 27, 2006Date of Patent: July 20, 2010Assignee: Hon Hai Precision Industry Co., Ltd.Inventors: Chang-Lin Yang, Chien-Ming Fan
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Patent number: 7644963Abstract: A hooking device includes a hook for clasping a latching device, a spring mounted to the hook for providing a restoration force to the hook, and a base securing the hook and the spring thereon. The hook includes a main portion, a catch portion, and a pair of shaft portions extending from the other end along opposite direction. The spring includes two winding portions, two first arms extending from ends of the winding portions, the first arms acting on the hook; and two second arms extending from the other ends of the winding portions. The base includes a base plate defining an opening, two supporting plates accommodating the shaft portions, two bearing plates extending from the base plate, the second arms acting on the bearing plate, and an elastic arm extending from the base plate pushing on the other end of the main portion of the hook.Type: GrantFiled: December 22, 2006Date of Patent: January 12, 2010Assignee: Hon Hai Precision Industry Co., Ltd.Inventors: Chien-Ming Fan, Jung-Hsiang Lee, Chang-Lin Yang
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Patent number: 7633750Abstract: A locking device includes a case defining at least one slot therein, a hook module including at least one hook for passing through the at least one slot, a linkage module includes at least one first lever configured for shifting the at least one hook to move between a locking position and a releasing position, and a positioning module for releasably engaging with the first lever. When the at least one hook is shifted to the releasing position, the first lever is blocked by the positioning module, when the at least one hook is shifted to the locking position, the first lever is released by the positioning module.Type: GrantFiled: December 22, 2006Date of Patent: December 15, 2009Assignee: Hon Hai Precision Industry Co., Ltd.Inventors: Chien-Ming Fan, Chang-Lin Yang, Chin-Chung Fu
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Patent number: 7445479Abstract: An electronic connecting device includes a plate defining an opening therein, a connector for being movable along the opening, a controller for shifting the connector to different height positions.Type: GrantFiled: August 10, 2006Date of Patent: November 4, 2008Assignee: Hon Hai Precision Industry Co., Ltd,Inventors: Chien-Ming Fan, Wei-Kuo Sung, Jung-Hsiang Lee, Chang-Lin Yang
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Publication number: 20070297130Abstract: A locking device includes a case defining at least one slot therein, a hook module including at least one hook for passing through the at least one slot, a linkage module includes at least one first lever configured for shifting the at least one hook to move between a locking position and a releasing position, and a positioning module for releasably engaging with the first lever. When the at least one hook is shifted to the releasing position, the first lever is blocked by the positioning module, when the at least one hook is shifted to the locking position, the first lever is released by the positioning module.Type: ApplicationFiled: December 22, 2006Publication date: December 27, 2007Inventors: CHIEN-MING FAN, Chang-Lin Yang, Chin-Chung Fu
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Publication number: 20070290512Abstract: A hooking device includes a hook for clasping the latching device, a spring mounted to the hook for providing a restoration force to the hook, and a base securing the hook and the spring thereon. The hook includes a main portion, a catch portion, and a pair of shaft portions extending from the other end along opposite direction. The spring includes two winding portions, two first arms extending from ends of the winding portions, the first arms acting on the hook; and two second arms extending from the other ends of the winding portions. The base includes a base plate defining an opening, two supporting plates accommodating the shaft portions, two bearing plates extending from the base plate, the second arms acting on the bearing plate, and an elastic arm extending from the base plate pushing on the other end of the main portion of the hook.Type: ApplicationFiled: December 22, 2006Publication date: December 20, 2007Inventors: CHIEN-MING FAN, Jung-Hsiang Lee, Chang-Lin Yang
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Publication number: 20070274034Abstract: A disk device includes a frame defining a tray housing and a rail housing communicating with the tray housing; a tray releasably received in the tray housing in the frame; and a rail movably incorporated in the rail housing. The rail includes a slide for drawing the tray out of the frame, and a latching member for detachably engaging with the tray. The slide is movable along a first direction that exposes from the rail housing, the latching member is movable along a second direction substantially perpendicular to the first direction between a first position where the latching member is engaged with the tray and a second position where the latching member is disengaged with the tray.Type: ApplicationFiled: December 27, 2006Publication date: November 29, 2007Applicant: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: CHANG-LIN YANG, CHIEN-MING FAN